TruPlasma RF 1000 Air Series
The TruPlasma RF 1000 Air Series is an innovative air-cooled RF solution designed for high precision and efficiency in semiconductor and industrial coating applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Output Power TruPlasma RF 1000-0.6/13 Air | 0.6kW |
| Output Power TruPlasma RF 1000-1/13 Air | 1kW |
| Rated Power TruPlasma RF 1000-0.6/13 Air | 0.6kW |
| Rated Power TruPlasma RF 1000-1/13 Air | 1kW |
| Nominal Load Impedance | 50Ω |
| Output Frequency | 13.56MHz |
| Line Voltage | 190-240V |
| Line Frequency | 50-60Hz |
| Line Input Power TruPlasma RF 1000-0.6/13 Air | 1.0kVA |
| Line Input Power TruPlasma RF 1000-1/13 Air | 1.6kVA |
| Power Factor | >0.9 |
| Sync Interfaces | yes |
| Analog/Digital | yes |
| RS232/RS485 | yes |
| PROFIBUS | no |
| EtherCAT | yes |
| DeviceNet | yes |
| Weight | <15kg |
| IP Protection Class | 20 |
| Maximum Water Pressure | Air |
| Minimum Pressure Difference | Air |
| Minimum Flow Rate | Air |
| Coolant Temperature | Air |
| Overall Efficiency | >70% |
| Certificates/Standards | Semi S2, SEMI F47, UL, CE, RoHS |
| Outside Temperature | 5°C-40°C |
| Humidity | 5%-85% |
| Barometric Pressure | 79.5kPa-106kPa |
Applications
Key Features
Datasheet
Supplier Information
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