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TruPlasma RF Series 1000/3000
The TruPlasma RF Series 1000/3000 provides high-frequency generators designed for plasma applications, ensuring stable output power and high control accuracy for reliable operation.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Output Power Range TruPlasma RF 1001 (G2/13) | 1W...1000W |
| Output Power Range TruPlasma RF 1002 (G2/13) | 1W...2000W |
| Output Power Range TruPlasma RF 1003 (G2/13) | 1W...3000W |
| Maximum Reflected Power | 600W |
| Output Frequency | 13.56MHz±0.005% |
| Output Impedance | 50Ω |
| Harmonic Signals | -40dBc |
| Spurious Signals | -50dBc |
| Power Accuracy | ±1W or ±1% |
| Fluctuation at 50Ω Load | ±1W |
| Cooling Medium | Water |
| Ambient Temperature | 5°C...35°C |
| Dimensions (W x H x D) | 216x128.5x405mm |
| Weight | 18kg |
| Protection Class | 30 |
| Standards and Directives | SEMI F47, SEMI S2, UL, CSA, CE, RoHS |
Applications
Key Features
Datasheet
Supplier Information
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