TruPlasma MW 1000 Series

TruPlasma MW 1000 Series

Supplier
Trumpf
Part Number
TruPlasma MW 1000 Series
Category
Semiconductor Manufacturing Equipment
Origin
Germany

The TruPlasma MW 1000 Series is an innovative 1000 W water-cooled 2450 MHz microwave solid-state power generator designed for precise and repeatable power delivery in semiconductor applications.

Request a Quote Download Datasheet Chat
Save to Favorites Save to Favorites

Overview

The TruPlasma MW 1000 Series is an innovative 1000 W water-cooled 2450 MHz microwave solid-state power generator designed for precise and repeatable power delivery in semiconductor applications.

Specifications

ParameterValue
Regulation ModeForward power
Regulation ModeDelivered power
Pulse Mode1kHz to 1000kHz (upon request)
Pulse Duty Cycle3%-90%
Minimum Pulse On-Time (FWHM)30ns
Ripple of Output Power5% RMS
Multi-Level PulsingUpon request
Phase Control (CEX)0° to 360° with 1° resolution
MW Output Power Range10W to nominal power
Maximum Reflected PowerNominal power
Power Accuracy±5% of nominal power
Operating Frequency2450MHz ±50MHz
Nominal Output Frequency Accuracy1ppm
Frequency Steps100kHz
Output Impedance50Ω
Harmonic Signals-40dBc
MW Output ConnectorCoaxial cable N-type female connector, 50Ω or WR340
Wall-Plug EfficiencyUp to 55%
Power SupplyExternal AC DC power supply with 96% efficiency
Dimensions419x203x162mm
Weight9kg
Standards and DirectivesCE, RoHS, EN: UL 61010 (NRTL)

Applications

1. Semiconductor thin film deposition 2. Plasma ignition optimization 3. Heating dielectric objects 4. Non-equilibrium plasma applications

Key Features

1. Frequency agility of ±2% around center frequency 2. Ultrashort microwave pulsing down to 30ns 3. Multi-level pulsing capability 4. Compact design for close plasma process installation

Datasheet

Product Datasheet
PDF
Download

Supplier Information

Tr
Trumpf
View Supplier →
<p>Our task is to further develop and digitally network production technology to make it more economical, precise and future-proof. To do this, we want to plan production and its upstream and downstream workflows more efficiently. This is how we strive to shape the industrial world of the future. As a market and technology leader in machine tools and lasers in the industrial production field, our innovations have impacted almost all walks of life. Our software solutions pave the way for smart factories and enable high-tech processes in industrial electronics.</p>

Request a Quote

Our team responds within 24–48 hours
TruPlasma MW 1000 Series
Trumpf · Semiconductor Manufacturing Equipment
Direct from Manufacturer
Your inquiry will be sent directly to the manufacturer
Photonics Source Platform
We handles the inquiry on your behalf
Your information is protected and will never be shared without consent.
Contact Us

Loading...

GetExperimental Plan

Name

Phone

+86

Organization

Use Case

AI Parametric Selection
Smart Match · Precise Recs
Enter Specifications
AI Smart Matching
Get Best Matches
Skip Manual Comparison
Find Best Solutions Fast
Select Now →