TruPlasma MW 1000 Series
The TruPlasma MW 1000 Series is an innovative 1000 W water-cooled 2450 MHz microwave solid-state power generator designed for precise and repeatable power delivery in semiconductor applications.
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Overview
The TruPlasma MW 1000 Series is an innovative 1000 W water-cooled 2450 MHz microwave solid-state power generator designed for precise and repeatable power delivery in semiconductor applications.
Specifications
| Parameter | Value |
|---|---|
| Regulation Mode | Forward power |
| Regulation Mode | Delivered power |
| Pulse Mode | 1kHz to 1000kHz (upon request) |
| Pulse Duty Cycle | 3%-90% |
| Minimum Pulse On-Time (FWHM) | 30ns |
| Ripple of Output Power | 5% RMS |
| Multi-Level Pulsing | Upon request |
| Phase Control (CEX) | 0° to 360° with 1° resolution |
| MW Output Power Range | 10W to nominal power |
| Maximum Reflected Power | Nominal power |
| Power Accuracy | ±5% of nominal power |
| Operating Frequency | 2450MHz ±50MHz |
| Nominal Output Frequency Accuracy | 1ppm |
| Frequency Steps | 100kHz |
| Output Impedance | 50Ω |
| Harmonic Signals | -40dBc |
| MW Output Connector | Coaxial cable N-type female connector, 50Ω or WR340 |
| Wall-Plug Efficiency | Up to 55% |
| Power Supply | External AC DC power supply with 96% efficiency |
| Dimensions | 419x203x162mm |
| Weight | 9kg |
| Standards and Directives | CE, RoHS, EN: UL 61010 (NRTL) |
Applications
1. Semiconductor thin film deposition 2. Plasma ignition optimization 3. Heating dielectric objects 4. Non-equilibrium plasma applications
Key Features
1. Frequency agility of ±2% around center frequency 2. Ultrashort microwave pulsing down to 30ns 3. Multi-level pulsing capability 4. Compact design for close plasma process installation
Datasheet
Product Datasheet
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Supplier Information
<p>Our task is to further develop and digitally network production technology to make it more economical, precise and future-proof. To do this, we want to plan production and its upstream and downstream workflows more efficiently. This is how we strive to shape the industrial world of the future. As a market and technology leader in machine tools and lasers in the industrial production field, our innovations have impacted almost all walks of life. Our software solutions pave the way for smart factories and enable high-tech processes in industrial electronics.</p>
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