TruPlasma MF Series 7000 (G2)

TruPlasma MF Series 7000 (G2)

Supplier
Trumpf
Part Number
TruPlasma MF Series 7000 (G2)
Category
Semiconductor Manufacturing Equipment
Origin
Germany

The TruPlasma MF Series 7000 (G2) generators offer outstanding layer quality and high productivity, even for challenging and reactive DMS processes. With superior arc management, high efficiency, and flexible cooling concepts, these generators are ideal for demanding applications in architectural glass, display/touch panels, and thin-film solar cells.

Specification Snapshot
Output Voltage
≤1100V (1500V boost)
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Overview

The TruPlasma MF Series 7000 (G2) generators offer outstanding layer quality and high productivity, even for challenging and reactive DMS processes. With superior arc management, high efficiency, and flexible cooling concepts, these generators are ideal for demanding applications in architectural glass, display/touch panels, and thin-film solar cells.

Specifications

ParameterValue
Output Power100kW, 120kW, 150kW
Output Voltage≤1100V (1500V boost)
Frequency Range20-50kHz (standard), 20-70kHz (extended)
Max Arc Rate8000/s
Arc Detection Time0.7μs
Arc DetectionU absolute, I absolute, Intelligent I_envelope
Residual Energy1mJ/kW
Arc Shutdown Time1.5-2μs (UltraFast), flexible e.g. 20μs
Mains Voltage380-480V ±10%
Mains Frequency45-65Hz
Power Factor0.95
EfficiencyUp to 91%
Current Control Accuracy±0.25% maximum output current ±1% set value
Cooling MethodWater
Rate of Water Flow≥30l/min @25°C, ≥43l/min @35°C, ≥31l/min @45°C
Cooling Water Temperature5°C-35°C or 45°C with power derating
InterfacesRS232/485, Ethernet, Profibus, A/D, EtherCAT, PROFINET, Ethernet IP, DeviceNet IP, OPC UA IoT interface
Dimensions (W x H x D)800x2000x800mm
Opening Angle Doors130° and 180°
Weight610kg, 660kg
Protection ClassIP54

Applications

1. Large area coating for architectural glass 2. Coating processes in the display/touch panel industry 3. Thin-film solar cell production

Key Features

1. Superior arc management for outstanding layer quality and productivity 2. High operating efficiency with minimal energy consumption 3. Flexible cooling concept for stable operation under challenging conditions 4. Broad operating voltage range suitable for worldwide applications

Datasheet

Product Datasheet
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Supplier Information

Tr
Trumpf
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<p>Our task is to further develop and digitally network production technology to make it more economical, precise and future-proof. To do this, we want to plan production and its upstream and downstream workflows more efficiently. This is how we strive to shape the industrial world of the future. As a market and technology leader in machine tools and lasers in the industrial production field, our innovations have impacted almost all walks of life. Our software solutions pave the way for smart factories and enable high-tech processes in industrial electronics.</p>

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