TruPlasma DC Series 3000 (G2) and Series 4000 (G2)

TruPlasma DC Series 3000 (G2) and Series 4000 (G2)

Supplier
Trumpf
Part Number
TruPlasma DC Series 3000 (G2) and Series 4000 (G2)
Category
Semiconductor Manufacturing Equipment
Origin
Germany

The TruPlasma DC Series 3000 (G2) and Series 4000 (G2) are advanced DC power supplies designed for industrial plasma processes, offering high reliability and performance for applications such as solar cell production, architectural glass coating, semiconductor manufacturing, and hard coating.

Specification Snapshot
Dimensions
482mm x 133mm x 610mm to 482mm x 265mm x 611mm (Series 3000), 482mm x 178mm x 720mm to 482mm x 357mm x 720mm (Series 4000)
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Overview

The TruPlasma DC Series 3000 (G2) and Series 4000 (G2) are advanced DC power supplies designed for industrial plasma processes, offering high reliability and performance for applications such as solar cell production, architectural glass coating, semiconductor manufacturing, and hard coating.

Specifications

ParameterValue
Output Power10kW to 300kW (Series 3000), 10kW to 200kW (Series 4000)
Output Voltage1000V (Series 3000), 1000V/1200V (Series 4000)
Output Current25A to 750A (Series 3000), 25A to 133A (Series 4000)
Regulation ModesPower
Regulation Modesvoltage
Regulation Modescurrent
Regulation ModesSimReg
Operation Duty Cycle100%
Regulation Accuracy±0.5%
Load Impedance5.3Ω to 21.2Ω (Series 3000), adjustable (Series 4000)
Ignition Capability1500V/Floating Anode
Efficiency92% (Series 3000), >90% (Series 4000)
Power Factor>0.96
Cooling SpecificationsWater-cooled
Max. Water Pressure2bar to 7bar
Min. Differential Pressure2bar
Water Flow4l/min to 12l/min (Series 3000), 8l/min per module (Series 4000)
Max. Cooling Water Temperature+20°C to +35°C (Series 3000), up to +35°C (Series 4000)
Ambient Temperature+5°C to +45°C operating, -25°C to +55°C storage
Relative Humidity5% to 85% non-condensing
Air Pressure860hPa to 1060hPa
InterfacesAnalog/Digital, RS232/RS485, PROFIBUS, DeviceNet, EtherCAT, Profinet
Protection ClassIP40
Dimensions482mm x 133mm x 610mm to 482mm x 265mm x 611mm (Series 3000), 482mm x 178mm x 720mm to 482mm x 357mm x 720mm (Series 4000)
Weight45kg to 85kg (Series 3000), 60kg to 150kg (Series 4000)

Applications

1. Solar cell production 2. Architectural glass coating 3. Semiconductor manufacturing 4. Hard coating applications

Key Features

1. CompensateLine allows for better results in highly arcing processes 2. Extremely low stored arc energy and fast recovery time 3. State-of-the-art solution for DC sputtering applications 4. High power density at very compact size 5. Proven large-volume generator design and full water cooling

Datasheet

Product Datasheet
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Supplier Information

Tr
Trumpf
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<p>Our task is to further develop and digitally network production technology to make it more economical, precise and future-proof. To do this, we want to plan production and its upstream and downstream workflows more efficiently. This is how we strive to shape the industrial world of the future. As a market and technology leader in machine tools and lasers in the industrial production field, our innovations have impacted almost all walks of life. Our software solutions pave the way for smart factories and enable high-tech processes in industrial electronics.</p>

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