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TruPlasma DC Series 3000 (G2) and Series 4000 (G2)
State-of-the-art DC power supplies designed for industrial plasma processes, including DC sputtering and reactive sputtering applications. These generators deliver high power density, reliability, and performance for coating processes such as solar cell production, architectural glass coating, and hard optical coatings.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Output Power | 10kW-300kW (Series 3000), 10kW-200kW (Series 4000) |
| Output Voltage | 1000V (Series 3000), 1000V/1200V (Series 4000) |
| Output Current | 25A-750A (Series 3000), 25A, 50A, 100A, 33A, 66.5A, 133A (Series 4000) |
| Regulation Modes | Power |
| Regulation Modes | voltage |
| Regulation Modes | current |
| Regulation Modes | SimReg |
| Operation Duty Cycle | 100% |
| Regulation Accuracy | ±0.5% |
| Load Impedance | 5.3Ω-21.2Ω (Series 3000), adjustable (Series 4000) |
| Ignition Capability | 1500V/Floating Anode |
| Efficiency | 92% (Series 3000), >90% (Series 4000) |
| Power Factor | >0.96 |
| Cooling Specifications | Water-cooled |
| Max. Water Pressure | 2bar-7bar |
| Min. Differential Pressure | 2bar |
| Water Flow | 4l/min-12l/min (Series 3000), 8l/min per module (Series 4000) |
| Max. Cooling Water Temperature | +20°C to +35°C |
| Ambient Temperature | +5°C to +45°C (operating), -25°C to +55°C (storage) |
| Relative Humidity | 5%-85% non-condensing |
| Air Pressure | 860hPa-1060hPa |
| Interfaces | Analog/Digital (25-pin Sub-D), RS232/RS485 (9-pin Sub-D), PROFIBUS (9-pin Sub-D), DeviceNet (5-pin DeviceNet Connector), EtherCAT (2xRJ45) |
| Protection Class | IP40 |
| Designation | CE Declaration of conformity available upon request |
| Dimensions | 482mm x 133mm x 610mm (Series 3000), 482mm x 178mm x 610mm (Series 4000) |
| Weight | 45kg-150kg |
Applications
Key Features
Datasheet
Supplier Information
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