NPXY300-291 Nanopositioning Stage
The NPXY300-291 is a heavy-load, long-travel XY scanner with a maximum load of 5kg, 300μm×300μm travel and a 95mm×85mm through-hole, while measuring only 23mm thick. It is suitable for nanofabrication, nanoimprinting, optical measurement, storage science, materials science and related applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Footprint | 179mm X 179mm X 23mm H |
| Aperture | 85mm X 95mm |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 1560g |
| Nanomotion Control | XY |
| Closed-loop Travel | 300µm|300µm |
| Open-loop Travel (-30 to 150 V) | 360µm|360µm |
| Position Noise | 1nm|1nm |
| Stiffness | 0.7N/µm|0.7N/µm |
| Resonant Frequency | 240Hz|240Hz |
| Settling Time | 20ms|20ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 8.2µF|8.2µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
Datasheet
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Supplier Information
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