PM52.1-Series Displacement Amplifier PM52.11S
Specification Snapshot
Nominal Travel [Tolerance ±15%]
100 μm
Maximum Travel [Tolerance ±15%]
120 μm
Resolution
0.01 μm
Linearity
0.1
Repeatability
10 nm
Capacitance [Tolerance ±15%]
1.5 μF
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Specifications
| Parameter | Value |
|---|---|
| Nominal Travel [Tolerance ±15%] | 100 μm |
| Maximum Travel [Tolerance ±15%] | 120 μm |
| Closed-Loop Sensor | SGS |
| Resolution | 0.01 μm |
| Linearity | 0.1 |
| Repeatability | 10 nm |
| Thrust / Pulling Force [Tolerance ±15%] | 40/20 |
| Capacitance [Tolerance ±15%] | 1.5 μF |
| Resonant Frequency [Tolerance ±15%] | 900 Hz |
| Mass [Tolerance ±5%] | 40 g |
| Material | Stainless Steel, Aluminum Alloy |
| Operating Temperature | -20~80 °C |
| Interface | LEMO |
Key Features
Displacement Output 500μm or Higher; Integrated Strain-Gauge or Capacitive Sensor for Closed Loop
Datasheet
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Supplier Information
Raiven Technology, founded in 2023 and located in Shanghai Zhangjiang Science City, focuses on advanced measurement and control technology. Targeting fields such as pan-semiconductor and commercial aerospace, it provides micro/nano measurement and control solutions, including high-end drive control, advanced ceramics, and precision actuators. With a 2,500-square-meter industrialization base, its products have been applied in semiconductor lithography, inspection, and other equipment. The core team comes from semiconductor equipment, aerospace, and other industries with rich experience. The company is committed to providing one-stop solutions and services to drive the industrial and technological revolution.
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