PM52.1-Series Displacement Amplifier PM52.13S
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Specifications
| Parameter | Value |
|---|---|
| Nominal Travel [Tolerance ±15%] | 300 μm |
| Maximum Travel [Tolerance ±15%] | 330 μm |
| Closed-Loop Sensor | SGS |
| Resolution | 0.015 μm |
| Linearity | 0.15 |
| Repeatability | 20 nm |
| Thrust / Pulling Force [Tolerance ±15%] | 35/15 |
| Capacitance [Tolerance ±15%] | 3 μF |
| Resonant Frequency [Tolerance ±15%] | 400 Hz |
| Mass [Tolerance ±5%] | 50 g |
| Material | Stainless Steel, Aluminum Alloy |
| Operating Temperature | -20~80 °C |
| Interface | LEMO |
Key Features
Datasheet
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Supplier Information
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