LF3 Nanopositioning Stage LF3.300
The LF3 is a three-axis nanopositioner with 100, 200 or 300 microns of X and Y travel, 50 microns of Z travel and a large 66 x 66 mm aperture. This piezo stage can be combined with coarse-positioning microstages; see our hybrid systems.
Specification Snapshot
Cable length
2 m
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Overview
The LF3 is a three-axis nanopositioner with 100, 200 or 300 microns of X and Y travel, 50 microns of Z travel and a large 66 x 66 mm aperture. This piezo stage can be combined with coarse-positioning microstages; see our hybrid systems.
Specifications
| Parameter | Value |
|---|---|
| Range of motion XY/Z | 300/50 |
| Resolution XY/Z | 0.3/0.05 |
| Noise floor XY/Z | typical:0.03/0.005 |
| Repeatability XY/Z | 0.6/0.1 |
| Linearization | typical:0.02% |
| Resonant frequency XYZ | 300/200/1500 |
| Stiffness XYZ | 0.4/0.3/3 |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 140 mm × 121 mm × 35.2 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | Standard |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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