HS1 Nanopositioning Stage HS1.10
The HS1 is a compact nanopositioning stage that can be combined into 2-axis or even 3-axis nanopositioning systems. It offers travel ranges of 10, 30, 50, 70 or 100 microns and is also available with an aperture; see HS1H. This stage is part of our high-speed product line, with a high-power controller available.
Specification Snapshot
Repeatability
0.02 nm
Resonant frequency
7000 Hz
Cable length
2 m
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Overview
The HS1 is a compact nanopositioning stage that can be combined into 2-axis or even 3-axis nanopositioning systems. It offers travel ranges of 10, 30, 50, 70 or 100 microns and is also available with an aperture; see HS1H. This stage is part of our high-speed product line, with a high-power controller available.
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 10 µm |
| Resolution | 0.01 nm |
| Noise floor | typical:0.0001 nm |
| Repeatability | 0.02 nm |
| Linearization | typical:0.02% |
| Resonant frequency | 7000 Hz |
| Stiffness | 5.2 N/µm |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 62.5 mm × 69.5 mm × 12.6 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | Standard or High Speed |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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