CRYO STAGE 02 (CS02) CS021-RLS
Specification Snapshot
Load capacity
1000 grams
Operating temperature
0.8–375 K
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Specifications
| Parameter | Value |
|---|---|
| Active axes | 3 |
| Type of motion | x, y, z orthogonal |
| Coarse range [See CS021 interface drawing for details] | max 10 x 10 x 5 |
| Scan range [ambient] | 8 µm^3 × 8 µm^3 × 8 µm^3 |
| Scan range [4K] | 1.6 µm^3 × 1.6 µm^3 × 1.6 µm^3 |
| X and Y positioner (including scanning) [See CBS product page for detailed information;this source contains no further CBS specifications] | CBS10 |
| Z positioner [See CLA product page for detailed information;this source contains no further CLA specifications] | CLA2601 |
| Z scanning actuator | piezo ceramic |
| Z-scanner sensitivity [ambient] | 66 nm/V |
| Z-scanner sensitivity [4K] | 13 nm/V |
| Endstops [xy endstops can be touched without problems. Touching z endstops is ideally avoided and can be prevented with RLS position feedback;touching does not cause damage but requires manual action to free it] | xy +/-5mm and z +/-3mm |
| Main construction materials | Titanium, Aluminium, Stainless steel |
| Load capacity | 1000 grams |
| Operating temperature | 0.8–375 K |
| Mass | 230 grams |
| Controller/driver | CAB-230(115), CADM2 |
| Sensor readout | RSM |
| Scanner module for z-scanner | PSM, PSMIL |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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