CRYO BEARING STAGE (CBS) CBS10-RLS
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Specifications
| Parameter | Value |
|---|---|
| Active axes | 1 |
| Type of motion | Linear, any orientation |
| Coarse/scanning actuator [Coarse/scan positioning is both done with the CADM2, not simultaneously] | Piezo ceramic |
| Coarse Range | 10 mm |
| Speed [ambient] | 3 mm/s |
| Speed [4K] | 1 mm/s |
| Min. step size [ambient] | 150 nm |
| Min. step size [4K] | 50 nm |
| Scan Range [ambient] | 8 µm |
| Scan Range [4K] | 1.6 µm |
| Scanner sensitivity [ambient；CADM2 0–150V, 10 bits resolution, setpoint rate approx.10Hz] | 66 nm/V |
| Scanner sensitivity [4K；CADM2 0–150V, 10 bits resolution, setpoint rate approx.10Hz] | 13 nm/V |
| Driving force [ambient] | 2 N |
| Driving force [4K] | 1 N |
| Load capacity | 2 kg |
| Mechanical endstops | at begin and end of range |
| Operating temperature | 0.02–375 K |
| Main construction material | Titanium, bronze, ceramic |
| Mass | 33 grams |
| Controller/driver | CAB-230(115), CADM2 |
| Sensor readout | RSM |
Datasheet
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Supplier Information
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