A-PHD Air Bearing Guide - Round Air Bearing Pad PHD30R

A-PHD Air Bearing Guide - Round Air Bearing Pad PHD30R

Supplier
Nano-stage
Part Number
PHD30R
Category
Positioner
Origin
China

Customization Supported; Microhole Array Jets Form an Air-Bearing Layer for Air-Bearing Guides

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Overview

Customization Supported; Microhole Array Jets Form an Air-Bearing Layer for Air-Bearing Guides

Specifications

ParameterValue
Dimensions30 mm
Ideal Load Capacity [0.4MPa]150 N
Stiffness25 N/mm
Air Gap Height6.5 um
Flatness0.5 um
Maximum Air Pressure0.9 Mpa
Air Consumption0.5 S/min
Ball Rod Radius13 mm

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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A-PHD Air Bearing Guide - Round Air Bearing Pad PHD30R
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