NANO STEPPER ACTUATOR UHV (NSAU) NSAU-010A
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Specifications
| Parameter | Value |
|---|---|
| Active axes | 1 |
| Type of motion | x |
| Range | 10 mm |
| Max. velocity | 0.1 mm/s |
| Step resolution nominal [full step] | 50 (full step) |
| Step resolution best [20x micro stepping] | 2.5 (20x micro stepping) |
| Repeatability | 2 x step resolution |
| Accuracy full stroke | 6 (IT5) |
| Backlash | none |
| Axial load capacity | ±300 N |
| Radial load capacity | 5% of actual axial load |
| Axial stiffness | 2e7 N/m |
| Mass | 1.0 kg |
| Vacuum compatibility | UHV |
| Bake-out temperature | <80 °C |
| Stepper motor | 2 phase, bipolar |
| Max current / phase | <0.8 A |
| Resistance / phase | 5.4 Ω |
| Inductance / phase | 1.5 mH |
| Limit switches | Normally open, switch to GND |
| Thermal sensor | Pt1000, keep below 80°C |
| Encoder voltage | 4.75-5.5 VDC |
| Encoder current, typical | 0.08 A |
| Encoder resolution [ST: SingleTurn resolution, counts per revolution；MT: MultiTurn resolution, number of countable revolutions] | 12 bit ST; 12 bit MT; 2,44nm/count |
| Encoder interface | SSI, RS485/RS422 compatible |
| Controller | CAB-230(115), NCM1 |
Datasheet
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Supplier Information
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