Synthetic quartz material FLH301
High-purity synthetic quartz glass made by CVD from high-purity SiCl₄ undergoes secondary electric-fusion reshaping and machining to produce regular cylindrical ingots, tubes/rings, and other products. Applications include advanced semiconductor processes and precision optics.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Al Impurity | typical:＜0.05 |
| Ca Impurity | typical:＜0.02 |
| Cu Impurity | typical:＜0.005 |
| Fe Impurity | typical:＜0.005 |
| Ti Impurity | typical:＜0.01 |
| Mn Impurity | typical:＜0.01 |
| K Impurity | typical:＜0.01 |
| Na Impurity | typical:＜0.02 |
| OH impurity | typical:900~1300 ppm |
| Bubbles | No bubbles visible to the naked eye; or no bubbles with a diameter or length of 0.03mm or greater detected under a microscope at 100× magnification or higher |
| Transmittance [200nm] | ≥85% |
| Appearance color | Uniform external surface color, with no mixed colors; the interior is colorless and transparent after application of red oil. |
| Surface contaminants | No toxic or harmful residue |
| Density | 2.2 g/cm³ |
| Young's Modulus | 74 GPa |
| Poisson’s Ratio | 0.17 |
| Flexural Strength | 65 MPa |
| Compressive strength | 1300 MPa |
| Tensile Strength | 49 MPa |
| Torsional strength | 29 MPa |
| Mohs Hardness | 6~7 |
| Dielectric Constant | 3.7 |
| Dielectric loss | 0.0002 |
| Electrical Resistivity | 1×10¹⁶ |
| Strain Point [η=10^(14.5); Source parentheses also contain ℃] | 1070 ℃ |
| Annealing point [η=10¹³; Source parentheses also contain ℃] | 1150 ℃ |
| Softening Point [η=10^(7.8); Source parentheses also contain ℃] | 1670 ℃ |
| Thermal Conductivity [20℃] | 1.24 W/m·k |
| Specific Heat | 749 J/kg.k |
| Thermal Diffusivity | 7.5 ×10⁻⁷·m²/s |
| Coefficient of Thermal Expansion [α；25℃~320℃] | 5.2~5.8 ×10⁻⁷/k |
Applications
Key Features
Datasheet
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