Quil graphite ceramics
Suitable for optoelectronic/semiconductor equipment including MOCVD, red four-element and blue-light equipment; inquiries are welcome. 1. Quartz quality: GE124 raw material is described as top-quality AA grade, with few bubbles and low impurities. Trace-element composition is tested spectrometrically and expressed as weight ratios in ppm. Bubble-content notes: Cu.Ft. means cubic feet; Cu.Decimeter is labeled cubic inches. 2. Applications: the same optoelectronic/semiconductor equipment. 3. Product manufacturing process. 4. Product control. Graphite: SGL R6510 and R6650 materials have low impurity content, tested by SGS at the Taipei materials/engineering laboratory in Taiwan Province. Ceramic materials suit high temperatures and acid/alkali corrosion resistance. Applications include thin-film, yellow-light and etching-system components and robotic arms.
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Overview
Specifications
| Parameter | Value |
|---|---|
| impurities - Al [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 14 ppm |
| impurities - As [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.002 ppm |
| impurities - B [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.2 ppm |
| impurities - Ca [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.4 ppm |
| impurities - Cd [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.001 ppm |
| impurities - Cr [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.05 ppm |
| impurities - Cu [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.05 ppm |
| impurities - Fe [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.2 ppm |
| impurities - K [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.6 ppm |
| impurities - Li [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.6 ppm |
| impurities - mg Mg [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.1 ppm |
| impurities - Mn [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.05 ppm |
| impurities - Na [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.7 ppm |
| impurities - Ni [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.1 ppm |
| impurities - P [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.2 ppm |
| impurities - Sb [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <0.003 ppm |
| impurities - Ti [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 1.1 ppm |
| impurities - Zr [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | 0.8 ppm |
| Impurity Content—OH⁻ [Zigraphite GE124; Figure 5 Type 124; Spectrometer weight ratio, ppm from the retention of JSON ' s description of this table] | <5 ppm |
| Bubble content [Shigeki GE124; figure 6; Bubble Size line: 1-2 mm (.040"–080”)] | 1 Number/Cu.Ft. |
| Bubble content [Shigeki GE124; figure 6; Bubble Size line: 1-2 mm (.040"–080”)] | .04 Number/Cu.Decimeter |
| Bubble content [Stonering GE124; figure 6; Bubble Size line: 5-1 mm (.020"–040”)] | 6 Number/Cu.Ft. |
| Bubble content [Stonering GE124; figure 6; Bubble Size line: 5-1 mm (.020"–040”)] | .21 Number/Cu.Decimeter |
| Bubble content [Shigeki GE124; figure 6; Bubble Size existing line: 5 (.020)] | No Limit |
| Bubble content [Shigeki GE124; figure 6; Bubble Size existing line: 5 (.020)] | No Limit |
| Density [graphite; figure 10; CZ5 R6510; source table unlisted] | 1.83 |
| Porosity (open) [graphite; figure 10; CZ5 R6510; source table unlisted] | 10 |
| Grain Size [graphite; figure 10; CZ5 R6510; source table unlisted] | 10 |
| Rockwell Hardness [graphite; figure 10; CZ5 R6510 column; source table unincorporated; original tic text retained] | 95 HR5/100 |
| Young's Modulus [graphite; figure 10; CZ5 R6510; source table unlisted] | 11.5 |
| Flexural Strength [graphite; figure 10; CZ5 R6510; source table unlisted] | 60 |
| Compressive Strength [graphite; figure 10; CZ5 R6510; source table unlisted] | 125 |
| Specif. Electrical Resistivity [graphite; figure 10; CZ5 R6510; source table unlisted] | 13 |
| Thermal Expansion [graphite; figure 10; CZ5 R6510; source table unlisted; 20-1000°C] | 5.1 |
| Density [graphite; figure 10; column R6650; source table not indicated] | 1.84 |
| Porosity (open) [graphite; figure 10; column R6650; source table not indicated] | 10 |
| Grain Size [graphite; figure 10; column R6650; source table not indicated] | 7 |
| Rockwell Hardness [graphite; figure 10; column R6650; source table unindicated; original tic text retained] | 95 HR5/100 |
| Young's Modulus [graphite; figure 10; column R6650; source table not indicated] | 12.5 |
| Flexural Strength [graphite; figure 10; column R6650; source table not indicated] | 65 |
| Compressive Strength [graphite; figure 10; column R6650; source table not indicated] | 150 |
| Specif. Electrical Resistivity [graphite; figure 10; column R6650; source table not indicated] | 14 |
| Thermal Expansion [graphite; figure 10; column R6650; unit not indicated in source table; 20-1000°C] | 5.0 |
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