Micro LED
Micro OLED (micro organic light-emitting diode) offers high contrast, fast response and low power for wearables, VR and AR. Wafer-defect inspection is essential because the small devices require extremely clean surfaces; scratches, particles, cracks or contamination can impair performance or cause failure. Precision inspection therefore supports comprehensive quality control of silicon-based Micro OLED wafers. The manufacturer's Tornado series uses an RGB multiwavelength source and a Cell 2 Cell algorithm developed for array-structured chips to improve detection accuracy and efficiency. A 20X inspection lens detects submicron defects. Multi-Recipe inspection uses different illumination wavelengths for R, G and B layers to capture layer-specific defects. C2C provides high sensitivity and subpixel defect detection; measurements have detected defects approximately 300nm in size. Further defect examples are referenced.
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