Diaphragm Air Spring

The diaphragm air spring uses a flexible diaphragm airbag structure with compressed air as the elastic medium. It has a low natural frequency and excellent vertical and lateral isolation performance. The diaphragm resists aging and provides good airtightness over a wide load range. Combined with an active control system, it can provide automatic leveling and vibration suppression. Its compact structure facilitates integration into precision vibration isolation platforms for semiconductor inspection, optical measurement and precision instruments requiring extremely low vibration. The spring is a core high-performance pneumatic isolation component with a sealed flexible rubber diaphragm airbag, differing from conventional bellows-type air springs. Compressed air inside the airbag provides elastic support with an extremely low natural frequency and excellent vertical and lateral isolation. The product uses a special aging-resistant rubber diaphragm for lasting airtightness. Its compliant stiffness and wide load range effectively prevent transmission of high-frequency ground vibration. Used with an active damping system, it enables rapid tabletop leveling and active vibration suppression, greatly reducing tabletop disturbances caused by external vibration. It can be used with granite platforms, precision inspection equipment, semiconductor metrology instruments, optical tables and electron microscopes. Various mounting specifications can be customized. Its compact structure facilitates integration into separate or integrated isolation platforms, making it a preferred isolation component for low-vibration environments in ultraprecision manufacturing.

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