Active Vibration Isolation System
Active vibration isolation systems and components. High-performance active vibration isolators are important components of ultraprecision manufacturing equipment and wafer inspection and metrology equipment. An active vibration isolation system supports the overall weight of ultraprecision manufacturing equipment while providing vibration isolation, vibration damping and shock resistance. It protects stable operation throughout wafer manufacturing processes, provides high-performance isolation from foundation vibration and rapidly settles table disturbances caused by motion-induced impacts during inspection and measurement, providing an extremely low-vibration production platform for wafer manufacturing processes.
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