Precision optical ultrasound cleaner
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Specifications
| Parameter | Value |
|---|---|
| Cleaning the tank material [Technical description of the original parameter chart] | Quality 304/316L stainless steel mirror panel |
| Cleaning of welding and handling [Technical description of the original parameter chart] | Internal welding, welding, polishing, welding, round-angle processing, and a seamless, non-dead-cut interior, which makes it difficult to hide particles. |
| Cleaning slot depth [Unprinted Specific Depth/ Frequency Not completed] | Design based on a matching ultrasound conversion frequency |
| The projection. [Technical description of the original parameter chart] | All sluices are configured to a prowl, so the cleaning level is even. |
| Filter and Destatic Configuration [Technical description of the original parameter chart] | Class 100 high-efficiency filter (FFU) at the top of the equipment; plasma antistatic mesh below |
| Cleaning of surface mass [Class 100 cleanroom; after D300 glass-wafer cleaning; AOI equipment inspection] | No watermarks, no spasms, no scratches. |
| Particles Above 5um [Class 100 cleanroom; after D300 glass-wafer cleaning; AOI equipment inspection] | ≤50 颗 |
| Particles Above 20um [Class 100 cleanroom; after D300 glass-wafer cleaning; AOI equipment inspection] | ≤10 颗 |
| Particle over 100um [Class 100 cleanroom; after D300 glass-wafer cleaning; AOI equipment inspection] | = 0 |
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