MX63/MX63L Semiconductor/FPD Inspection Microscopes

The MX63 and MX63L microscope systems support quality inspection of wafers up to 300 millimeters in size, flat-panel displays, printed circuit boards, and other samples.

Meeting electronics industry needs. Functionality: additional functions designed for industry ergonomics and safety requirements enhance analysis. User friendliness: simple microscope settings make adjustment and recall of system configurations easier. Imaging technology: mature, reliable optics and excellent imaging technology provide clear images and reliable inspections. Modularity: users customize systems by selecting modules for their applications. Analysis tools: the MX63 series' observation functions generate clear images for reliable defect inspection. New illumination technology and Olympus Stream image analysis software acquisition options provide more choices for sample evaluation and archiving inspection results. From invisible to visible: MIX observation and acquisition. Combining darkfield with brightfield, fluorescence, polarized light or other observation methods produces distinctive images and reveals defects difficult to observe with conventional microscopes. The ring LED illuminator for darkfield provides directional darkfield illumination in four independently segmented quadrants, reducing halos and helping reveal surface texture. Easy panoramic imaging: instant MIA. With multiple image alignment (MIA), users quickly stitch images by moving the manual stage XY knobs; this operation is unnecessary with a motorized stage. Olympus Stream uses pattern recognition to generate panoramic images with a wider field of view. All-in-focus imaging: EFI. Extended focal imaging (EFI) captures images of samples whose height exceeds the depth of field, stacking them into a single all-in-focus sample image. With manual or motorized Z-axis stages, EFI easily creates height images that visualize structure. EFI images can be generated offline in Olympus Stream desktop software. HDR acquisition of bright and dark regions: image processing adjusts brightness differences to reduce glare, improving digital image appearance and supporting professional reports. From basic measurement to advanced analysis: measurement is important for quality, process control and inspection. Even entry-level Olympus Stream includes a full menu of interactive measurements, with results saved alongside image files for later recall. Olympus Stream materials solutions also provide intuitive workflows for complex image analysis. A button click completes tasks quickly and accurately, greatly reducing repetitive processing time and allowing operators to focus on inspection. Efficient report creation: creating reports often takes longer than image acquisition and measurement. Olympus Stream provides intuitive reporting to repeatedly create complex professional reports from preset templates. Editing is easy, and reports export to MicrosoftWord or PowerPoint. Reporting also provides digital zoom and magnification of acquired images. Moderate file sizes facilitate email data transfer. Standalone camera options: measurement is important for quality, process control and inspection. Even entry-level Olympus Stream includes the full interactive measurement menu and stores results with image files for later recall. Materials solutions provide intuitive workflows for complex image analysis, with fast and accurate button-click operation that reduces repetitive work and frees operators to focus on inspection. The MX63 series with a DP22 or DP27 microscope camera is a standalone system. A compact camera control box occupies little space while supporting clear image acquisition and basic measurements, making effective use of laboratory space. Intuitive microscope control: comfortable and easy to use. Simple microscope settings make system adjustment and recall easier. Quickly finding focus: focus assist. Inserting focus assist into the optical path enables easy, reliable focusing on low-contrast samples such as bare wafers. Focusing on a grid in the focal plane simplifies sample focusing. Fast observation with light intensity management and automatic aperture control: conventional microscopes require light intensity and aperture adjustment for each observation. The MX63 series stores conditions for different magnifications and observation methods. Easily recalled settings save time and provide excellent image quality. Ergonomic design enables faster, more comfortable operation: objective changing and aperture diaphragm controls are low on the microscope front, so users need not release the focus knob or move away from the eyepieces. Fine optical performance and digital imaging for quality inspection: Olympus' long history of high-quality optics and digital imaging has produced reliable optics and microscopes with excellent measurement accuracy. Excellent optical performance: wavefront aberration control. Objective optical performance directly affects image quality and analytical conclusions. Olympus UIS2 high-magnification objectives minimize wavefront aberration for reliable optical performance. Consistent color temperature: high-intensity white LED illumination. MX63 uses high-intensity white LEDs for reflected and transmitted illumination, maintaining consistent color temperature at any intensity for reliable image quality and color reproduction. LEDs offer efficient, long-life illumination suited to materials science. Measurement: automatic calibration. As with digital microscopes, Olympus Stream enables automatic calibration to eliminate human calibration variability and provide more reliable measurement. An algorithm automatically calculates correct calibration values from the average of multiple measurement points, minimizing operator differences, maintaining stable accuracy and improving routine verification reliability. Clear images: image shading correction. Olympus Stream corrects shading around image corners. Combined with intensity threshold settings, shading correction enables improved analysis.