Laser and White Light Confocal Microscope L7
Lasertec, Japan, introduced the OPTELICS Hybrid confocal microscope, combining laser and white light sources for versatile, high performance confocal microscopy. Two sets of confocal optics work with accessories including an interferometer, differential interference contrast observation and spectral reflectance film thickness measurement. Lasertec is a Japanese semiconductor inspection equipment company founded in 1960, primarily supplying semiconductor wafer and photomask…
Specification Snapshot
Frame Rate
15–120 Hz
Request a Quote
Download Datasheet
Overview
Lasertec, Japan, introduced the OPTELICS Hybrid confocal microscope, combining laser and white light sources for versatile, high performance confocal microscopy. Two sets of confocal optics work with accessories including an interferometer, differential interference contrast observation and spectral reflectance film thickness measurement. Lasertec is a Japanese semiconductor inspection equipment company founded in 1960, primarily supplying semiconductor wafer and photomask…
Specifications
| Parameter | Value |
|---|---|
| Zoom Magnification | 1×–8× |
| Light Intensity Frame Storage | 1024×1024×12bit; High Definition mode 2048×2048×12bit |
| Height Frame Storage | 1024×1024×16bit; High Definition mode 2048×2048×16bit |
| Frame Rate | 15–120 Hz |
| Minimum Horizontal Measurement Increment | 0.001 μm |
| Horizontal Accuracy | ±[0.02×(100/ Objective Magnification )+L/1000] μm |
| Horizontal Reproducibility [3σ;100×(NA0.95) Objective test Standard Sample] | 10 nm |
| Function | White Light Confocal focus 、 Laser Total focus 、 differential interference Observation 、 Vertical White Light Interferometry test 、 reflection Tap Film Thickness test |
| Onscreen Magnification [White Light Source ; Objective 1×;24 inch Display] | 18.5× |
| Field of View (H×V) [White Light Source ; Objective 1×] | 15000 μm × 15000 μm |
| Onscreen Magnification [White Light Source ; Objective 2.5×;24 inch Display] | 46.2× |
| Field of View (H×V) [White Light Source ; Objective 2.5×] | 6000 μm × 6000 μm |
| Onscreen Magnification [White Light Source ; Objective 5×;24 inch Display] | 92.5× |
| Field of View (H×V) [White Light Source ; Objective 5×] | 3000 μm × 3000 μm |
| Onscreen Magnification [White Light Source ; Objective 10×;24 inch Display] | 185× |
| Field of View (H×V) [White Light Source ; Objective 10×] | 1500 μm × 1500 μm |
| Onscreen Magnification [White Light Source ; Objective 20×;24 inch Display] | 370× |
| Field of View (H×V) [White Light Source ; Objective 20×] | 750 μm × 750 μm |
| Onscreen Magnification [White Light Source ; Objective 50×;24 inch Display] | 925× |
| Field of View (H×V) [White Light Source ; Objective 50×] | 300 μm × 300 μm |
| Onscreen Magnification [White Light Source ; Objective 100×;24 inch Display] | 1850× |
| Field of View (H×V) [White Light Source ; Objective 100×] | 150 μm × 150 μm |
| Onscreen Magnification [White Light Source ; Objective 150×;24 inch Display] | 2775× |
| Field of View (H×V) [White Light Source ; Objective 150×] | 100 μm × 100 μm |
| Laser Light Source wavelength | 405 nm |
| Onscreen Magnification [Laser Light Source ; Objective 50×;24 inch Display] | 1850× |
| Field of View (H×V) [Laser Light Source ; Objective 50×] | 150 μm × 150 μm |
| Onscreen Magnification [Laser Light Source ; Objective 100×;24 inch Display] | 3700× |
| Field of View (H×V) [Laser Light Source ; Objective 100×] | 75 μm × 75 μm |
| Onscreen Magnification [Laser Light Source ; Objective 150×;24 inch Display] | 5550× |
| Field of View (H×V) [Laser Light Source ; Objective 150×] | 50 μm × 50 μm |
| Height Scale Resolution | 0.05 nm |
| Height Accuracy | ±(0.11+L/100) μm |
| Height Reproducibility [σ;100×(NA0.95) Objective and VLSI Company Standard Height Sample] | 10 nm |
| Height Measurement Range [Used Objective Working Distance Within] | 7 mm |
| Objective Turret | 5 Lens Motorized Turret , Provides Lens Position Automatic Recognition Function |
| Phase Contrast Interferometry test Function | Optional |
| Software Image Acquisition | High Dynamic Range Rendering mode 、 Image Stitching Function 、 Multiple Gain mode and Others |
| Software Image Processing | surface Calibration ( tilt 、 Spherical )、 Denoising 、 Color Selection 、 Binarization and Others |
| Software Shape Analysis | Cross Section Profile Analysis 、 Comparison Analysis 、 Roughness Measurement 、 width Measurement 、 Film Thickness Measurement and Others |
| Software Data Export | Proprietary and General Files ( Common Image Formats 、CSV、STEP and Others ) |
| Software Productivity Tools | LM Menu 、 Filtering Aid 、 Macro Function 、 Intelligent Roughness Assessment 、Office Report Generation |
| Power Supply parameter | AC100V 50/60Hz; Approximately 800VA |
| Microscope Body Dimensions and Weight | 382(W)×511(D)×689(H)mm; Approximately 40kg |
| Control Unit Dimensions and Weight | 430(W)×450(D)×100(H)mm; Approximately 7kg |
| LED Light Source Unit Dimensions and Weight | 142(W)×279(D)×210(H)mm; Approximately 3.8kg |
| Light Box Dimensions and Weight | 142(W)×311(D)×227(H)mm; Approximately 6.7kg |
| Control PC Dimensions and Weight | 175(W)×440(D)×360(H)mm; Approximately 9kg |
| Monitor Dimensions and Weight | 556(W)×180(D)×513(H)mm; Approximately 4kg |
| Z Travel Range | 80 mm |
| XY Sample Stage Motorized Configuration | ○ |
| Differential Interference Contrast Observation | ○ |
| Vertical White Light Interferometry test Function | ○ |
| Reflectometric Film Thickness Measurement | ○ |
Key Features
The dual laser and white light optical system provides six functions: white light confocal, laser confocal, differential interference contrast, reflectometric film thickness measurement, phase contrast interferometry and vertical white light interferometry. HYBRID offers high speed automatic measurement at frame rates of 15Hz to 120Hz, automatic defect detection and classification, width repeatability 3σ=10nm and height repeatability σ=10nm. It supports 3D and two dimensional measurement, surface roughness measurement and film thickness measurement.
Datasheet
Please provide your email to download the datasheet.
Your name
Email Address
Invalid email format. Please try again.
Send Request
Supplier Information
Beijing Optic Electronic Technology Co., Ltd. (Optic Electronic) was founded in 2010. It is a high-tech enterprise focusing on the optoelectronic field, providing domestic scientific research institutions and industrial users with instruments, equipment and overall solutions in optical inspection, micro-nano processing, laser applications and other fields. The company is headquartered in Changping, Beijing, with offices in Shanghai and Guangzhou, serving the whole country.
Beijing Optic Electronic Technology Co., Ltd. (Optic Electronic) was founded in 2010 and has been deeply engaged in the optoelectronic field for more than ten years, focusing on introducing and promoting mature and innovative optoelectronic technologies and reliable products from overseas, and providing professional instruments, equipment and supporting services for domestic scientific research institutions and industrial enterprises. Its products cover optical inspection and analysis, laser and micro-nano processing, semiconductor packaging inspection, physical property analysis, and special optical fibers and crystals, and are widely used in semiconductor manufacturing, materials science, biomedicine, university research and national defense.
Contact Us
Loading...
GetExperimental Plan
Name
Phone
+86
Organization
Use Case

Global Photonics Products
Database Platform
Database Platform
With 16 years of experience, we provide high-quality products and services to universities, research institutes, and industry.
50+ Detailed Categories · 3,000+ Global Brands · 100,000+ Photonics Products
1 Million+
In-depth analysis of professional academic resources in photonics
300,000
ProductsDatasheets Available Free
We will keep your personal information strictly confidential.
Product Quote
+86
* Select the quoting party:
By submitting, you agree to the User Service Agreement and Privacy Policy