Laser and White Light Confocal Microscope C3

Laser and White Light Confocal Microscope C3

Supplier
Oelectron
Part Number
C3
Category
Microscopes
Origin
China

Lasertec, Japan, introduced the OPTELICS Hybrid confocal microscope, combining laser and white light sources for versatile, high performance confocal microscopy. Two sets of confocal optics work with accessories including an interferometer, differential interference contrast observation and spectral reflectance film thickness measurement. Lasertec is a Japanese semiconductor inspection equipment company founded in 1960, primarily supplying semiconductor wafer and photomask…

Specification Snapshot
Frame Rate
15–120 Hz
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Overview

Lasertec, Japan, introduced the OPTELICS Hybrid confocal microscope, combining laser and white light sources for versatile, high performance confocal microscopy. Two sets of confocal optics work with accessories including an interferometer, differential interference contrast observation and spectral reflectance film thickness measurement. Lasertec is a Japanese semiconductor inspection equipment company founded in 1960, primarily supplying semiconductor wafer and photomask…

Specifications

ParameterValue
Zoom Magnification1×–8×
Light Intensity Frame Storage1024×1024×12bit; High Definition mode 2048×2048×12bit
Height Frame Storage1024×1024×16bit; High Definition mode 2048×2048×16bit
Frame Rate15–120 Hz
Minimum Horizontal Measurement Increment0.001 μm
Horizontal Accuracy±[0.02×(100/ Objective Magnification )+L/1000] μm
Horizontal Reproducibility [3σ;100×(NA0.95) Objective test Standard Sample]10 nm
FunctionWhite Light Confocal focus
Onscreen Magnification [White Light Source ; Objective 1×;24 inch Display]18.5×
Field of View (H×V) [White Light Source ; Objective 1×]15000 μm × 15000 μm
Onscreen Magnification [White Light Source ; Objective 2.5×;24 inch Display]46.2×
Field of View (H×V) [White Light Source ; Objective 2.5×]6000 μm × 6000 μm
Onscreen Magnification [White Light Source ; Objective 5×;24 inch Display]92.5×
Field of View (H×V) [White Light Source ; Objective 5×]3000 μm × 3000 μm
Onscreen Magnification [White Light Source ; Objective 10×;24 inch Display]185×
Field of View (H×V) [White Light Source ; Objective 10×]1500 μm × 1500 μm
Onscreen Magnification [White Light Source ; Objective 20×;24 inch Display]370×
Field of View (H×V) [White Light Source ; Objective 20×]750 μm × 750 μm
Onscreen Magnification [White Light Source ; Objective 50×;24 inch Display]925×
Field of View (H×V) [White Light Source ; Objective 50×]300 μm × 300 μm
Onscreen Magnification [White Light Source ; Objective 100×;24 inch Display]1850×
Field of View (H×V) [White Light Source ; Objective 100×]150 μm × 150 μm
Onscreen Magnification [White Light Source ; Objective 150×;24 inch Display]2775×
Field of View (H×V) [White Light Source ; Objective 150×]100 μm × 100 μm
Height Scale Resolution0.05 nm
Height Accuracy±(0.11+L/100) μm
Height Reproducibility [σ;100×(NA0.95) Objective and VLSI Company Standard Height Sample]10 nm
Height Measurement Range [Used Objective Working Distance Within]7 mm
Objective Turret5 Lens Motorized Turret , Provides Lens Position Automatic Recognition Function
Phase Contrast Interferometry test FunctionOptional
Software Image AcquisitionHigh Dynamic Range Rendering mode 、 Image Stitching Function 、 Multiple Gain mode and Others
Software Image Processingsurface Calibration ( tilt 、 Spherical )、 Denoising 、 Color Selection 、 Binarization and Others
Software Shape AnalysisCross Section Profile Analysis 、 Comparison Analysis 、 Roughness Measurement 、 width Measurement 、 Film Thickness Measurement and Others
Software Data ExportProprietary and General Files ( Common Image Formats 、CSV、STEP and Others )
Software Productivity ToolsLM Menu 、 Filtering Aid 、 Macro Function 、 Intelligent Roughness Assessment 、Office Report Generation
Power Supply parameterAC100V 50/60Hz; Approximately 800VA
Microscope Body Dimensions and Weight382(W)×511(D)×689(H)mm; Approximately 40kg
Control Unit Dimensions and Weight430(W)×450(D)×100(H)mm; Approximately 7kg
LED Light Source Unit Dimensions and Weight142(W)×279(D)×210(H)mm; Approximately 3.8kg
Light Box Dimensions and Weight142(W)×311(D)×227(H)mm; Approximately 6.7kg
Control PC Dimensions and Weight175(W)×440(D)×360(H)mm; Approximately 9kg
Monitor Dimensions and Weight556(W)×180(D)×513(H)mm; Approximately 4kg
Z Travel Range100 mm
XY Sample Stage Manual Configuration○
XY Sample Stage Motorized ConfigurationOptional
Differential Interference Contrast ObservationOptional
Vertical White Light Interferometry test FunctionOptional
Reflectometric Film Thickness MeasurementOptional

Key Features

The dual laser and white light optical system provides six functions: white light confocal, laser confocal, differential interference contrast, reflectometric film thickness measurement, phase contrast interferometry and vertical white light interferometry. HYBRID offers high speed automatic measurement at frame rates of 15Hz to 120Hz, automatic defect detection and classification, width repeatability 3σ=10nm and height repeatability σ=10nm. It supports 3D and two dimensional measurement, surface roughness measurement and film thickness measurement.

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Supplier Information

Oe
Oelectron
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Beijing Optic Electronic Technology Co., Ltd. (Optic Electronic) was founded in 2010. It is a high-tech enterprise focusing on the optoelectronic field, providing domestic scientific research institutions and industrial users with instruments, equipment and overall solutions in optical inspection, micro-nano processing, laser applications and other fields. The company is headquartered in Changping, Beijing, with offices in Shanghai and Guangzhou, serving the whole country. Beijing Optic Electronic Technology Co., Ltd. (Optic Electronic) was founded in 2010 and has been deeply engaged in the optoelectronic field for more than ten years, focusing on introducing and promoting mature and innovative optoelectronic technologies and reliable products from overseas, and providing professional instruments, equipment and supporting services for domestic scientific research institutions and industrial enterprises. Its products cover optical inspection and analysis, laser and micro-nano processing, semiconductor packaging inspection, physical property analysis, and special optical fibers and crystals, and are widely used in semiconductor manufacturing, materials science, biomedicine, university research and national defense.

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