AL120 Wafer Transfer Machines

AL120 Wafer Transfer Machines

Supplier
Smagics
Part Number
AL120
Category
Microscopes
Origin
China

The AL120 wafer handler accommodates silicon and compound semiconductor wafers of sizes below 200mm. It transports thin wafers safely and efficiently and is well suited to wafer inspection from front-end to back-end processes.

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Overview

The AL120 wafer handler accommodates silicon and compound semiconductor wafers of sizes below 200mm. It transports thin wafers safely and efficiently and is well suited to wafer inspection from front-end to back-end processes.

Applications

Wafer inspection from front-end to back-end processes

Key Features

Broad applicability and flexible combinations. Multiple size combinations: 3 models are available—a dedicated 200 mm model, a combined 200 mm/150 mm model and a 150 mm model for wafers smaller than 150 mm. Depending on the inspection mode, select the “L type” for microscopic inspection or the “LMB type” for combined microscopic and macroscopic inspection. Wafer size/thickness compatibility table. Thin-wafer inspection: meeting thin-wafer manufacturers' needs, the new transfer arm on the AL120-LMB-90 can handle an entire cassette of 25 ultrathin 90 μm wafers. High practicality; further optimized macroscopic inspection. Backside macroscopic 360゜ rotation: the macroscopic inspection arm rotates 360゜ to make scratches and fine dust easier to find. The 360゜ rotation allows visual inspection of the entire wafer, including the edge. During front-surface macroscopic inspection, the joystick allows the wafer to be freely tilted 30゜ for observation. Convenient operation: the AL120 stores up to 10 inspection programs for routine inspection requirements, recording specific cassettes, wafers and transfer speeds. Quick menu selection buttons allow immediate switching between programs. The wafer transfer menu and setting parameters appear on the new LCD display. The RECALL button displays the corresponding SLOT recorded as defective during inspection for operator reconfirmation. AL120 uses noncontact optical positioning to locate and align notches/flats, reducing contact between the wafer and equipment and improving wafer cleanliness. High reliability. Priority for wafer and operator safety: the cassette is positioned at the front of the equipment for safe wafer loading. The system has passed SEMI S2/S8 safety and ergonomics tests and complies with the RoHS environmental directive. Rugged, durable microscope base: AL120 incorporates the Olympus MX professional wafer inspection microscope series, providing excellent image resolution and clarity through brightfield, darkfield, differential interference contrast (DIC), near IR and DUV observation. Interlocking the motorized objective turret and aperture diaphragm optimizes illumination and contrast for each objective. AL120 can also be specially customized for other microscopes. Ergonomically designed stage: a manual quick-release vacuum stage improves operator comfort and efficiency, with standard XY-axis control and wafer rotation. A motorized stage controlled by joystick or preset programs further automates inspection. A single action moves the stage to or from the load/unload and home positions.

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Supplier Information

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Smagics
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Shanghai Manji Optoelectronics was founded in 2018, a core supplier of microscopic imaging and laser processing equipment and overall solutions. We are deeply engaged in optical inspection and processing, with technological innovation as the core, providing high-precision customized optomechanical solutions. The company has a 1500㎡ R&D, production, sales and office integrated base in Shanghai, built a full-stack independent R&D and production system covering optics, mechanics, electronics and software. We have an independent AOI intelligent detection algorithm and interdisciplinary R&D team, achieving full control from core technology to system integration, providing deeply customized "turnkey" solutions to ensure high precision and reliability of equipment. Based on the frontier, we continue to expand. In 2025, we strategically deployed Dingyuan Biotechnology in Suzhou, focusing on R&D and production of biological live cell imaging equipment, improving cross-field layout and empowering biomedical research. In the future, Manji Optoelectronics will uphold the concept of "Mastering Precision with Light, Creating Innovation with Intelligence", working with partners to promote the progress of optical technology and industrial upgrading.

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AL120 Wafer Transfer Machines
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