excelliSCAN Series Galvanometer Scanners excelliSCAN 30
excelliSCAN is a high-end scanning galvanometer series for highly dynamic, high-precision, high-power laser processing. It uses SCANahead control technology and dynAXISse digital-encoder galvanometers, with clear apertures of 14, 20, and 30 mm. Its highly sealed, robust structure and optimized thermal management support water cooling and compressed-air lens cooling, with IP66 protection in the standard structure. It suits equipment demanding high processing speed, path precision, contour consistency, and process stability, including high-speed marking, precision micromachining, deep engraving, drilling, and additive manufacturing. Note: maximum positioning resolution of 20 bit is calculated over the full angular range, for example 0.7 µrad at ±0.36 rad. Resolution better than 16 bit (11 µrad) requires the SL2-100 interface. “—” indicates that the source does not list the item; refer to the official SCANLAB datasheet. Model selection should consider F-Theta lens focal length, laser wavelength, beam quality, and actual processing field. System integration reference: System component | Selection and integration considerations Laser | Select by material, wavelength, and power; standard coatings cover YAG, fiber, green, UV, DUV, and CO2 lasers. excelliSCAN Scanning galvanometer | Select 14 / 20 / 30 mm by incident beam diameter and power; 20 mm and 30 mm suit high-power applications. F-Theta Scan lens | Select by scan-field size, focal length, wavelength, and target spot. RTC6 Control board | With the SL2-100 interface and SCANahead, scanner and laser delays can be set automatically. Cooling | Water cooling and compressed-air lens cooling are supported; select by power.
Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture Dimension | 30 mm |
| Position Sensing Method | Digital encoder (dynAXISse) |
| Standard Coating (Wavelength Range) | YAG and fiber, green, UV, DUV and CO2 lasers |
| Maximum Laser Power [Standard system; 100% duty cycle; 1064 nm; with air cooling] | 3000 W @ 1064 nm (with air cooling) |
| Typical Scan Angle [Optical angle] | ±0.35 rad (optical angle) |
| Number of Preinstalled Tuning Modes | 1 type |
| Typical Tuning Modes | General tuning |
| Marking Speed | < 2 m/s |
| Positioning Speed | < 11.2 m/s |
| Writing Speed (High-Quality Mode) | 460 cps |
| Writing Speed (Good-Quality Mode) | 590 cps |
| Repeatability [RMS] | < 0.4 µrad |
| Maximum Positioning Resolution [Full angular range; for example, 0.7 µrad at ±0.36 rad; resolution better than 16 bit (11 µrad) requires the SL2-100 interface] | 20 bit |
| Nonlinearity [44°] | < 0.5 mrad / 44° |
| Temperature Drift (Zero Offset) | < 10 µrad/K |
| Temperature Drift (Gain) | < 5 ppm/K |
| Hourly Drift (Zero Offset) | < 20 µrad |
| Hourly Drift (Zero Offset) | < 25 µrad |
| Hourly Drift (Gain) | < 20 ppm |
| Hourly Drift (Gain) | < 25 ppm |
| Gain Error | < 5 mrad |
| Zero Offset Error | < 5 mrad |
| Servo Control | Digital Servo Control Board |
| Control Interface | Number SL2-100 |
| Advanced Diagnostics | Supports (iDRIVE) |
| Power Supply Requirements | 48 V DC, maximum 5 A |
| Scanning Axes | 2-axis system |
| Housing Type | Standard: scanning galvanometer |
| Connector Position | Beam entrance side; optional: opposite side at the beam exit |
| Weight (Without Field Lens, Standard Housing) | ~ 10 kg |
| Dimensions (L × W × H, Standard Housing) [Standard housing; water-cooled configuration] | 194.9 × 153 × 173 mm (water-cooled configuration) |
| Beam Offset | 35.54 mm |
| Water Cooling | Supported |
| Air Cooling | Supported (compressed-air cooling of scanning mirrors) |
| Operating Temperature | 25 °C ± 10 °C |
Applications
Key Features
Datasheet
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