SCANcube III Series Compact Galvanometer Scanners with High Dynamics and Low Drift SCANcube III 10
SCANcube III is a compact two-dimensional industrial laser-scanning series: SCANcube III 10 and SCANcube III 14 with 10 mm and 14 mm clear apertures. Analog position detectors and tuned drive electronics improve dynamics, stability and thermal performance for marking, precision micromachining, semiconductor/electronic processing and dynamic inline processing of moving workpieces. SCANcube III uses dynAXIS 3 galvos for optimized dynamics, precision and thermal behavior. Note: 16 bit resolution refers to the full angular range, 11 µrad at ±0.36 rad. Integration reference: System Component | Selection/Integration Laser | Select for Material, Wavelength, Power and Process. SCANcube III Scanner | SCANcube III 10 or SCANcube III 14。 F-Theta Scan Lens | Select for Working Distance, Field, Wavelength and Spot Requirements. Control System | SCANLAB RTC Control Board and laserDESK Software; Interfaces: SL2-100、XY2-100 and Analog ±4.8 V。 Expansion Modules | Evaluate Camera Adapter or varioSCAN II。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture (Entrance Aperture) | 10 mm |
| Position Sensing Method | Analog position detector |
| Standard Coating (Wavelength Range) | YAG and fiber, green, UV, CO2 lasers |
| Optional Coatings | Multiwavelength coating, broadband coating |
| Maximum Laser Power [Standard system; 100% duty cycle; 1064 nm] | 200 W @ 1064 nm |
| Typical Scan Angle [Optical angle] | ±0.35 rad (optical angle) |
| Scan Field Size | 110 mm × 110 mm |
| Typical Spot Size | 32 µm |
| Number of Preinstalled Tuning Modes | 1 type |
| Typical Tuning Modes | Fast vector tuning |
| Tracking Error | 0.12 ms |
| Marking Speed | 3.0 m/s |
| Positioning Speed | 16.0 m/s |
| Writing Speed (High-Quality Mode) | 700 cps |
| Writing Speed (Good-Quality Mode) | 925 cps |
| Step Response Time [1% full scale] | 0.30 ms |
| Step Response Time [10% full scale] | 0.80 ms |
| Repeatability [RMS] | < 2 µrad |
| Maximum Positioning Resolution [Full angular range; 11 µrad at ±0.36 rad] | 16 bit |
| Nonlinearity [44°] | < 0.9 mrad / 44° |
| Temperature Drift (Zero Offset) | < 25 µrad/K |
| Temperature Drift (Gain) | < 25 ppm/K |
| Hourly Drift (Zero Offset) | < 100 µrad |
| Hourly Drift (Gain) | < 100 ppm |
| Gain Error | < 5 mrad |
| Zero Offset Error | < 5 mrad |
| Servo Control | Analog servo control board |
| Control Interface | Digital SL2-100; Digital XY2-100 (Standard); Analog ±4.8 V |
| Advanced Diagnostics | Not Supported |
| Power Supply Requirements | ±15 V DC， maximum 2 A |
| Scanning Axes | 2-axis system |
| Housing Type | Standard: scanning galvanometer |
| Connector Position | Beam entrance side |
| Weight (Without Field Lens, Standard Housing) [Without Scan Lens; Standard Housing] | 1.9 kg |
| Dimensions (L × W × H, Standard Housing) | 114 mm × 96.5 mm × 94 mm |
| Beam Offset | 12.54 mm |
| Water Cooling | Not Supported |
| Air Cooling | Not Supported |
| Operating Temperature | 25 °C ± 10 °C |
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Datasheet
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