General-Purpose Laser Plane Interferometer XQ15-GI/II
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Specifications
| Parameter | Value |
|---|---|
| First Reference Flat (Surface A) - Diameter D1 | Φ146mm |
| First Reference Flat (Surface A) - Surface Figure Deviation PV | (PV)小千0.03um（λ／20) |
| Second Reference Plane (Face B) - Diameter D2 | Φ140mm |
| Second Reference Plane (Face B) - Surface Figure Deviation PV | (PV)小千0.03um(λ/20) |
| Collimation System - Working Diameter | Φ146mm |
| Collimation System—Focal Length f | 400mm |
| Light Source Specifications | ZN260 Laser (He-Ne) |
| Digital Analysis System | Mechanical Phase Shifting PSI-Zphasestation |
| Interferometer Cavity Dimensions | Φ 300 mm × 180 mm |
Key Features
Datasheet
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