Laser Interferometric Length Measurement System YJGCC1000
The laser interferometric length measurement system calibrates gauge blocks, measuring rods, scales and coordinate measuring machines in temperature-controlled, humidity-controlled and vibration-isolated metrology rooms. It supports precision measurement over large ranges of tens of meters and measurement of very small motions such as watch components. It measures geometric quantities including length, angle, straightness, parallelism, flatness and perpendicularity, and supports specialized applications such as micropositioning in semiconductor lithography and measurement of recording-track spacing in computer storage. The system retains high stability, accuracy and sampling rate while integrating the light source and measurement-signal reception and processing into the main unit, providing a more convenient, user-friendly integrated design.
Overview
Specifications
| Parameter | Value |
|---|---|
| Laser Frequency Stabilization Accuracy | ±0.02ppm |
| Measurement Range | 1mm-4000mm |
| Dynamic Acquisition Frequency | >100kHz |
| Measurement Wavelength [He-Ne Laser] | 632.99nm |
| Laser Power | >0.8mw |
| Available Measurement Modules | Temperature, Pressure and Humidity Measurement Modules |
| Intrinsic Measurement System Stability [5min; Customer-Provided High-Precision Environment] | ≤2nm |
| Signal Output | A/B-Phase Pulses |
| Communication | Ethernet Communication |
| Control Software | Data Display; Channel Switching |
| Development Interface | Supports Custom Software Development; DLL Dynamic-Link Library and Instructions Provided |
| System Operating Temperature | 10°C-30°C |
| Temperature Change Rate | <1.0°C/15min |
| Operating Humidity [Noncondensing] | 5% - 95% |
| Operating Humidity | 35%-60% |
| Vibration Environment | Vibration-Isolated Foundation Meeting VC-C or Better |
| Power Supply Voltage [AC] | 220V |
| Power Supply Frequency | 50HZ |
Datasheet
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