250mm Vertical Laser Plane Interferometer XQ25-GI
Builds on and further develops the practicality and durability of the XQ15-GIII laser Fizeau interferometer.
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Overview
Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Surface A) - Diameter | Φ250mm |
| First Reference Plane (Surface A) - Surface Figure Deviation | Less Than 0.045μm (λ/15) |
| Second Reference Plane (Surface B) - Diameter | Φ250mm |
| Second Reference Plane (Surface B) - Surface Figure Deviation | Less Than 0.045μm (λ/15) |
| Collimation System - Working Diameter | Φ250mm |
| Collimation System—Focal Length f | 590mm |
| Collimation System - Wavefront Aberration | <λ/10 |
| Working Chamber Dimensions | 550 mm × 400 mm × 300 mm |
| Light Source Specifications | ZN250 Laser (He-Ne) (632.8nm) |
| Instrument Overall Dimensions | 590×450×1150mm(H) |
| Instrument Mass | 200kg |
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Datasheet
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