Multilayer Vacuum Plasma Cleaner VP-100LA
The multilayer vacuum plasma cleaner has a moderately sized chamber meeting most product-cleaning needs. It supports chambers of different sizes and can be customized. A distinctive gas-distribution structure, together with precise pumping-speed and effective-power control during cleaning, improves uniformity. High-, medium- and low-specification options allow customers to choose a practical solution for their applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Overall dimensions | L1040*W800*H1820(mm) |
| Weight | 500kg |
| Cavity Dimensions | L460*W450*H500(mm) |
| Cavity Material [（ Customizable Stainless steel ）] | Aluminum alloy （ Customizable Stainless steel ） |
| Maximum Processable Product Dimensions | L400*W350*H390（mm） |
| Number of Electrode Plate Layers [(Customizable Vertical Direction)] | 9 Horizontal Layers (Vertical Direction Customizable) |
| Number of Processable Product Layers | 8 Layer |
| Power supply | Radio Frequency 13.56MHZ，0-1000W |
| Power supply [optional] | 40KHZ,0-1000W |
| Vacuum pump [(Imported Oil Pump/Dry Pump/Oil Pump + Roots Pump Options)] | Standard domestic oil pump; optional imported oil pump/dry pump/oil pump + Roots pump |
| Process Gas [(Nitrogen and Hydrogen Options)] | Argon and Oxygen (Nitrogen and Hydrogen Optional) |
| Vacuum gauge [(Imported Option Available)] | Domestic Pirani Resistance Vacuum Gauge (Imported Option Available) |
| Flow meter [(Imported Option Available)] | Domestic High-Precision Mass Flowmeter (Imported Option Available) |
| Flow rate Range | 0-300sccm |
| Operating Vacuum | ≤30Pa |
| Power supply | Three-Phase 380V |
| Power supply [optional] | Two-Phase 220V |
| Control | PLC+10.4 inch Touchscreen |
| Rated Power | 2.5KW |
Key Features
Datasheet
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Supplier Information
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