Inline Vacuum Plasma Cleaner HY-VP-16L
The inline vacuum plasma cleaner is fully automatic and requires no supervision. Products enter via the production line, are automatically scanned with data uploaded to MES, and undergo plasma cleaning. A distinctive gas-distribution structure and precise control of pumping speed and effective power improve cleaning uniformity. High-, medium- and low-specification options allow a practical configuration for each application.
Specification Snapshot
Weight
540kg
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Overview
The inline vacuum plasma cleaner is fully automatic and requires no supervision. Products enter via the production line, are automatically scanned with data uploaded to MES, and undergo plasma cleaning. A distinctive gas-distribution structure and precise control of pumping speed and effective power improve cleaning uniformity. High-, medium- and low-specification options allow a practical configuration for each application.
Specifications
| Parameter | Value |
|---|---|
| Overall dimensions | L1630*W1010*H1820(mm) |
| Weight | 540kg |
| Applicable Product dimensions | L≤400、W≤350、H≤20 (mm) |
| Evacuation Time | Less than 15s |
| Vacuum-Break Time | Less Than or Equal to s |
| Operating Vacuum | 10Pa-50Pa |
| Vacuum Measurement System | Pirani Resistance Vacuum Gauge |
| Gas Measurement System | High-Precision Mass Flowmeter |
| Process Gas [( Standard configuration )] | Oxygen and Argon (Standard) |
| Rated Power | 3.5KW |
| Transmission direction [Standard configuration] | ■ Left→Right |
| Transmission direction [Optional] | □ Right→Left |
| Required Air Pressure | 0.4-0.6Mpa |
| Display | 10.4-Inch Display |
| Control | Programmable Logic Controller (PLC) |
| Power supply | Three-Phase 380V |
| Power supply [optional] | 220V |
| RF power supply [Adjustable within the Range] | 0-500W |
| RF power supply [Optional] | 0-1000W |
Key Features
Fully automated left/right-through line; wafer-grade gas routing prevents leakage accidents; patented two-stage gas homogenization and armored electrodes improve plasma uniformity/reduce wasted plasma; sealed chamber within 5Pa; water angle <10° on FPC; cleaning <40℃; optional MES.
Datasheet
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Supplier Information
Zhuhai Huaya was founded in 2007 and is a professional intelligent manufacturing solution provider. Headquartered in Zhuhai, it has branches in Dongguan, Suzhou, Malaysia, and other places. The company has deep experience in optical technology, automation algorithms, visual inspection, and precision testing, serving customers such as Huawei, Gree, Valeo, and Panasonic. Huaya adheres to the philosophy of "customer-centric, striver-oriented" and aims to become the preferred intelligent equipment service provider.
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