Inline Vacuum Plasma Cleaner HY-VP-16L

Inline Vacuum Plasma Cleaner HY-VP-16L

Supplier
Huayazhuhai
Part Number
HY-VP-16L
Category
Semiconductor Packaging Equipment
Origin
China

The inline vacuum plasma cleaner is fully automatic and requires no supervision. Products enter via the production line, are automatically scanned with data uploaded to MES, and undergo plasma cleaning. A distinctive gas-distribution structure and precise control of pumping speed and effective power improve cleaning uniformity. High-, medium- and low-specification options allow a practical configuration for each application.

Specification Snapshot
Weight
540kg
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Overview

The inline vacuum plasma cleaner is fully automatic and requires no supervision. Products enter via the production line, are automatically scanned with data uploaded to MES, and undergo plasma cleaning. A distinctive gas-distribution structure and precise control of pumping speed and effective power improve cleaning uniformity. High-, medium- and low-specification options allow a practical configuration for each application.

Specifications

ParameterValue
Overall dimensionsL1630*W1010*H1820(mm)
Weight540kg
Applicable Product dimensionsL≤400、W≤350、H≤20 (mm)
Evacuation TimeLess than 15s
Vacuum-Break TimeLess Than or Equal to s
Operating Vacuum10Pa-50Pa
Vacuum Measurement SystemPirani Resistance Vacuum Gauge
Gas Measurement SystemHigh-Precision Mass Flowmeter
Process Gas [( Standard configuration )]Oxygen and Argon (Standard)
Rated Power3.5KW
Transmission direction [Standard configuration]■ Left→Right
Transmission direction [Optional]□ Right→Left
Required Air Pressure0.4-0.6Mpa
Display10.4-Inch Display
ControlProgrammable Logic Controller (PLC)
Power supplyThree-Phase 380V
Power supply [optional]220V
RF power supply [Adjustable within the Range]0-500W
RF power supply [Optional]0-1000W

Key Features

Fully automated left/right-through line; wafer-grade gas routing prevents leakage accidents; patented two-stage gas homogenization and armored electrodes improve plasma uniformity/reduce wasted plasma; sealed chamber within 5Pa; water angle <10° on FPC; cleaning <40℃; optional MES.

Datasheet

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Supplier Information

Hu
Huayazhuhai
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Zhuhai Huaya was founded in 2007 and is a professional intelligent manufacturing solution provider. Headquartered in Zhuhai, it has branches in Dongguan, Suzhou, Malaysia, and other places. The company has deep experience in optical technology, automation algorithms, visual inspection, and precision testing, serving customers such as Huawei, Gree, Valeo, and Panasonic. Huaya adheres to the philosophy of "customer-centric, striver-oriented" and aims to become the preferred intelligent equipment service provider.

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Inline Vacuum Plasma Cleaner HY-VP-16L
Huayazhuhai · Semiconductor Packaging Equipment
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