IBEAM-701
This power supply powers the RF ion source and neutralizer, including neutralizer RF and bias, ion-source bias and the control module. A separate RF supply is required for RF power to the ion source. It is specifically designed for RF ion sources equipped with an RF neutralizer.
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Overview
This power supply powers the RF ion source and neutralizer, including neutralizer RF and bias, ion-source bias and the control module. A separate RF supply is required for RF power to the ion source. It is specifically designed for RF ion sources equipped with an RF neutralizer.
Specifications
| Parameter | Value |
|---|---|
| Power supply Output | Five separate supplies power the RF discharge and RF neutralizer, respectively. |
| Ion-Beam Power Supply | 1500 Volts DC , 600 mA |
| Accelerating power supply | 1000 Volts DC , 50 mA |
| RF power supply | Ion-Source RF Power Supply Sold Separately |
| Neutralizer RF Generator | 100 W |
| Neutralizer Keeper Power Supply | 60 V, 300 mA |
| Neutralizer Emission Power Supply | 120 V, 1000 mA |
| Weight | 42 lb (18.9 kg) |
| Dimensions | 19 inch x7 inch x20 inch ; ( Width x High x Depth )483mmx178mmx508mm |
Key Features
1. Continuous large-LED display of all ion-source parameters to monitor source/process; 2. Flexible manual, automatic, and remote controls for full process control; 3. Separate display/keyboard for easy parameter setting/operation.
Datasheet
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Supplier Information
Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries.
The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.
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