6X22 Centimeter RF Ion Source 06X22RF
This 6X22cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The RF antenna is water-cooled; the source housing is not. Grids can be selected for different applications. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF operation reduces maintenance costs and permits reactive gases.
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Overview
This 6X22cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The RF antenna is water-cooled; the source housing is not. Grids can be selected for different applications. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF operation reduces maintenance costs and permits reactive gases.
Specifications
| Parameter | Value |
|---|---|
| Grid Material | Molybdenum or Graphite |
| Ion-Beam Neutralization | RF Neutralizer |
| Cooling method [RF antenna] | Water cooling ( RF antenna ) |
| Power supply | IBEAM-703 |
| Weight | 6 lb (2.7 kg) |
Applications
1. Sputter coating 2. Etching 3. Ion-beam assistance 4. Materials research and development
Key Features
1. Radio-frequency ignition without a filament; 2. Multiple Beam shape choices; 3. Various process gas options; 4. Adjustable ion-beam energy; 5. Easy maintenance.
Datasheet
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Supplier Information
Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries.
The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.
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