6X22 Centimeter RF Ion Source 06X22RF

6X22 Centimeter RF Ion Source 06X22RF

Supplier
Szkern
Part Number
06X22RF
Category
Optical Production Equipment
Origin
China

This 6X22cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The RF antenna is water-cooled; the source housing is not. Grids can be selected for different applications. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF operation reduces maintenance costs and permits reactive gases.

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Overview

This 6X22cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The RF antenna is water-cooled; the source housing is not. Grids can be selected for different applications. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF operation reduces maintenance costs and permits reactive gases.

Specifications

ParameterValue
Grid MaterialMolybdenum or Graphite
Ion-Beam NeutralizationRF Neutralizer
Cooling method [RF antenna]Water cooling ( RF antenna )
Power supplyIBEAM-703
Weight6 lb (2.7 kg)

Applications

1. Sputter coating 2. Etching 3. Ion-beam assistance 4. Materials research and development

Key Features

1. Radio-frequency ignition without a filament; 2. Multiple Beam shape choices; 3. Various process gas options; 4. Adjustable ion-beam energy; 5. Easy maintenance.

Datasheet

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Supplier Information

Sz
Szkern
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Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries. The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.

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6X22 Centimeter RF Ion Source 06X22RF
Szkern · Optical Production Equipment
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