16CM RF Ion Source 16RF08
This 16cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The source housing is water-cooled. Grids can be chosen for the application, with molybdenum, titanium or graphite options. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF reduces maintenance costs and enables reactive gases.
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Overview
This 16cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The source housing is water-cooled. Grids can be chosen for the application, with molybdenum, titanium or graphite options. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF reduces maintenance costs and enables reactive gases.
Specifications
| Parameter | Value |
|---|---|
| Beam Size (at Grid) [At the Grid] | 16 cm |
| Ion-Beam Current | 100----600 mA |
| Ion-Beam Energy | 100----1500 Electron Volts |
| Grid Material | Molybdenum, Titanium or Graphite |
| Ion-Beam Neutralization | RF Neutralizer |
| Cooling method [RF Antenna and Ion-Source Cover] | Water Cooling (RF Antenna and Ion-Source Cover) |
| Power supply | IBEAM-703 |
| Weight | 17 lb (7.7 kg) |
Applications
1. Sputter coating 2. Etching 3. Ion-beam assistance 4. Materials research and development
Key Features
1. Radio-frequency ignition without a filament; 2. Multiple Beam shape choices; 3. Various process gas options; 4. Adjustable ion-beam energy; 5. Easy maintenance.
Datasheet
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Supplier Information
Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries.
The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.
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