16CM RF Ion Source 16RF08

16CM RF Ion Source 16RF08

Supplier
Szkern
Part Number
16RF08
Category
Optical Production Equipment
Origin
China

This 16cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The source housing is water-cooled. Grids can be chosen for the application, with molybdenum, titanium or graphite options. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF reduces maintenance costs and enables reactive gases.

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Overview

This 16cm RF ion source offers flange or internal mounting. It includes grids, an RF antenna, discharge chamber, leads and gas insulators. The source housing is water-cooled. Grids can be chosen for the application, with molybdenum, titanium or graphite options. A power supply, gas controller and RF neutralizer are required. Ideal for ion assistance or sputtering, RF reduces maintenance costs and enables reactive gases.

Specifications

ParameterValue
Beam Size (at Grid) [At the Grid]16 cm
Ion-Beam Current100----600 mA
Ion-Beam Energy100----1500 Electron Volts
Grid MaterialMolybdenum, Titanium or Graphite
Ion-Beam NeutralizationRF Neutralizer
Cooling method [RF Antenna and Ion-Source Cover]Water Cooling (RF Antenna and Ion-Source Cover)
Power supplyIBEAM-703
Weight17 lb (7.7 kg)

Applications

1. Sputter coating 2. Etching 3. Ion-beam assistance 4. Materials research and development

Key Features

1. Radio-frequency ignition without a filament; 2. Multiple Beam shape choices; 3. Various process gas options; 4. Adjustable ion-beam energy; 5. Easy maintenance.

Datasheet

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Supplier Information

Sz
Szkern
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Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries. The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.

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16CM RF Ion Source 16RF08
Szkern · Optical Production Equipment
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