13 Centimeter DC Ion Source 13DC11

13 Centimeter DC Ion Source 13DC11

Supplier
Szkern
Part Number
13DC11
Category
Optical Production Equipment
Origin
China

This 13 cm filament-cathode DC ion source offers flange or internal mounting. Filament neutralization is standard, with plasma-bridge neutralization optional. Its outer housing is water-cooled. Grids are selected for the application. A power supply and gas controller are required.

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Overview

This 13 cm filament-cathode DC ion source offers flange or internal mounting. Filament neutralization is standard, with plasma-bridge neutralization optional. Its outer housing is water-cooled. Grids are selected for the application. A power supply and gas controller are required.

Specifications

ParameterValue
Beam Size (at Grid) [At the Grid]13 cm
Ion-Beam Current100----500 mA
Ion-Beam Energy100----1500 Electron Volts
Grid MaterialMolybdenum or Graphite
Ion-Beam NeutralizationFilament Neutralizer or PBN
Cooling method [Ion-Source Cover]Water Cooling (Ion-Source Cover)
Power supplyIBEAM-601 or IBEAM-602
Weight17 lb (7.7 kg)

Applications

1. Sputter coating 2. Etching 3. Ion-beam assistance 4. Materials research and development

Key Features

1. Filament cathode. 2. Filament neutralization or plasma-bridge neutralization. 3. Flange or internal mounting. 4. Different ion-beam energy options. 5. Easy maintenance.

Datasheet

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Supplier Information

Sz
Szkern
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Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries. The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.

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13 Centimeter DC Ion Source 13DC11
Szkern · Optical Production Equipment
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