13 Centimeter DC Ion Source 13DC11
This 13 cm filament-cathode DC ion source offers flange or internal mounting. Filament neutralization is standard, with plasma-bridge neutralization optional. Its outer housing is water-cooled. Grids are selected for the application. A power supply and gas controller are required.
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Overview
This 13 cm filament-cathode DC ion source offers flange or internal mounting. Filament neutralization is standard, with plasma-bridge neutralization optional. Its outer housing is water-cooled. Grids are selected for the application. A power supply and gas controller are required.
Specifications
| Parameter | Value |
|---|---|
| Beam Size (at Grid) [At the Grid] | 13 cm |
| Ion-Beam Current | 100----500 mA |
| Ion-Beam Energy | 100----1500 Electron Volts |
| Grid Material | Molybdenum or Graphite |
| Ion-Beam Neutralization | Filament Neutralizer or PBN |
| Cooling method [Ion-Source Cover] | Water Cooling (Ion-Source Cover) |
| Power supply | IBEAM-601 or IBEAM-602 |
| Weight | 17 lb (7.7 kg) |
Applications
1. Sputter coating 2. Etching 3. Ion-beam assistance 4. Materials research and development
Key Features
1. Filament cathode. 2. Filament neutralization or plasma-bridge neutralization. 3. Flange or internal mounting. 4. Different ion-beam energy options. 5. Easy maintenance.
Datasheet
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Supplier Information
Shenzhen Kern Trading Co., Ltd. is mainly engaged in the design and manufacture of complete electrical equipment and various vacuum control power supplies, as well as vacuum supporting products developed under the design and guidance of senior engineers from well-known foreign vacuum optical equipment industries.
The company's main products include: various types of vacuum valves, composite vacuum gauges, pressure controllers, E-type electron guns, electron gun scanning intelligent controllers, optical film thickness monitors, single-phase and three-phase power regulators, Hall ion sources, anode layer ion sources, etc.; it also acts as an agent for imported crystal-controlled film thickness controllers, crystal-controlled single-probe, dual-probe, six-probe and other related products.
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