StarLight-Sab Series
The StarLight-Sab ultraprecision micro/nanoprocessing system offers ultrafast laser options, electrically controlled micro/nanometer-precision translation stages and different laser focusing heads. A granite base and gantry provide compact construction, industrial-grade stability and high reliability. Enclosed beam delivery, adjustment and imaging include beam shaping, power monitoring, coaxial illumination and vision modules. This small benchtop laser-processing system supports precision femtosecond etching, micro/nanostructure fabrication, direct writing of photonic devices, functional surface modification, extreme nanomachining, touch-screen and ITO cutting, drilling/cutting of metals and ceramics, and micro/nanowaveguide processing on and inside silicon for frontier optoelectronic-device research.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motion Platform - Travel [X Axis; Compatible; All Specifications Can Be Customized] | ≤200mm |
| Motion Platform - Travel [Y Axis; Compatible; All Specifications Can Be Customized] | ≤200mm |
| Motion Platform - Travel [Z axis (air bearing); matching available; all parameters customizable] | ≤160m |
| Motion Platform - Resolution [X Axis; Compatible; All Specifications Can Be Customized] | 1nm |
| Motion Platform - Resolution [Y Axis; Compatible; All Specifications Can Be Customized] | 1nm |
| Motion Platform - Resolution [Z axis (air bearing); matching available; all parameters customizable] | 1nm |
| Motion Platform - Positioning Accuracy [X Axis; Compatible; All Specifications Can Be Customized] | ≤±300nm |
| Motion Platform - Positioning Accuracy [Y Axis; Compatible; All Specifications Can Be Customized] | ≤±300nm |
| Motion Platform - Positioning Accuracy [Z axis (air bearing); matching available; all parameters customizable] | ≤±200nm |
| Motion Platform - Repeatability (Bidirectional) [X Axis; Compatible; All Specifications Can Be Customized; Bidirectional] | ≤±100nm |
| Motion Platform - Repeatability (Bidirectional) [Y Axis; Compatible; All Specifications Can Be Customized; Bidirectional] | ≤±100nm |
| Motion Platform - Repeatability (Bidirectional) [Z axis (air bearing); compatible configuration available; all parameters customizable; bidirectional] | ≤±100nm |
| Motion Platform - Maximum Speed [X Axis; Compatible; All Specifications Can Be Customized] | 350mm/s |
| Motion Platform - Maximum Speed [Y Axis; Compatible; All Specifications Can Be Customized] | 350mm/s |
| Motion Platform - Maximum Speed [Z axis (air bearing); matching available; all parameters customizable] | 200mm/s |
| Motion Platform - Maximum Load [X Axis; Compatible; All Specifications Can Be Customized] | 12kg |
| Motion Platform - Maximum Load [Y Axis; Compatible; All Specifications Can Be Customized] | 12kg |
| Motion Platform - Maximum Load [Z axis (air bearing); matching available; all parameters customizable] | 12kg |
| Scanning Galvanometer-Input Aperture [Compatible; All Specifications Can Be Customized] | ≤14m |
| Scanning Galvanometer-Standard Scan Angle [Compatible; All Specifications Can Be Customized] | 40° |
| Field Lens-Focal Length [Compatible; All Specifications Can Be Customized] | f60/f100/f150 |
| Objective Lens-Magnification [Compatible; All Specifications Can Be Customized] | 5X/10X/20X/50X |
| Power Attenuator-Attenuation Range [Compatible; All Specifications Can Be Customized] | 0.1%~97% |
| Shutter-Switching Delay [Compatible; All Specifications Can Be Customized] | 170ms |
Applications
Key Features
Datasheet
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