Pulsed Laser Deposition System

Pulsed Laser Deposition System

Supplier
Exclaser
Category
Optical Production Equipment
Origin
China
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Specifications

ParameterValue
Ultrahigh-Vacuum Main ChamberSpherical chamber, 316L stainless steel, electropolished interior
Ultimate Vacuum6×10⁻⁹mbar
Temperature RangeRoom temperature -1100°C
Main Chamber Molecular Pump700L/s
Backing Mechanical Dry Scroll Pump4L/s
Diaphragm Vacuum GaugeMeasurement range 1Torr
Four-Axis Sample StageTravel Range X/Y:±15, Z:±15, Phi:90°
Infrared Laser Heater120-200W
Infrared Thermometer240-1400°C
Infrared Heating PID Temperature Controller-Sample Heating Rate [adjustable]0-100°C/min
Infrared Heating PID Temperature Controller-Accuracy0.5°C
Vacuum Interconnect Sample Holder CompatibilityVacuum Interconnection FLAGTYPE and Square/Round SiC Sample Holders for Samples up to 10×10mm
Target Holder with Revolution and Rotation6 Target Positions, Quick Plug-In Type
Mass Flow Controller0-100sccm
Gas circuitThree Gas Lines: N₂, O₂, Ar
System Support Platform80X80 Aluminum-Profile Table with Casters and Leveling Feet
Sample Stage HeatingSoftware Control
Pulse Laser ControlCounting and Continuous Modes Available
Growth Programming ModuleOne-Button Automatic Control of Multilayer-Film and Superlattice Growth
Horizontal Laser InputDN63 Quartz Window
Quick-Opening DoorDN160CF

Key Features

1. Target design: Precise repeatable positioning improves film quality; a unique holder addresses bearing wear/failure in vacuum.2. Heating: Infrared laser heating avoids frequent resistance-heater filament breakage.3. Chamber: Carefully designed structure/layout enables high-quality epitaxial films even without reflection high-energy electron diffraction(RHEED).

Datasheet

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Supplier Information

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Exclaser
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Hefei Excimer Laser Technology Co., Ltd. (For Short "EXCI") is founded by researchers from the Chinese Academy of Sciences. It is a world‑leading high‑tech enterprise specializing in independent R&D and industrialization of excimer lasers. The company focuses on complete‑machine R&D, large‑scale manufacturing and customized scenario‑oriented solution development for high‑end excimer lasers. Its products serve high‑end scientific research, precision industry and medical sectors, covering excimer laser annealing, lift‑off, repair, photolithography, pulsed laser deposition, superconducting tape fabrication, fiber Bragg grating inscription, and excimer laser medical devices. We provide standardized mass production, personalized customization and full‑life‑cycle maintenance services for multi‑power and multi‑category equipment. Excimer laser technology represents a scarce core technology for high‑end equipment. Worldwide, only more than ten enterprises across six countries (China, Germany, the United States, Japan, Canada and Russia) possess independent mass‑production core capabilities. ExciLaser ranks among the world’s first‑tier players. Committed to independent and controllable core technologies, the company precisely fills domestic gaps in the high‑end excimer laser industry. It has overcome multiple key bottleneck technologies, realized domestic substitution of high‑end laser equipment, and effectively broken overseas technological monopolies. Founded in March 2023, the company holds qualifications including National High‑Tech Enterprise, National Science‑ and Technology‑based Small‑ and Medium‑Sized Enterprise, and enterprise status in Hefei’s key industrial‑chain catalog. It has obtained ISO 9001 Quality Management System Certification. The company owns numerous invention patents, utility‑model patents and software copyrights, establishing a complete and independent intellectual‑property protection system to continuously underpin technological iteration, product upgrading and industrial implementation.

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Pulsed Laser Deposition System
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