Pulsed Laser Deposition System
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Specifications
| Parameter | Value |
|---|---|
| Ultrahigh-Vacuum Main Chamber | Spherical chamber, 316L stainless steel, electropolished interior |
| Ultimate Vacuum | 6×10⁻⁹mbar |
| Temperature Range | Room temperature -1100°C |
| Main Chamber Molecular Pump | 700L/s |
| Backing Mechanical Dry Scroll Pump | 4L/s |
| Diaphragm Vacuum Gauge | Measurement range 1Torr |
| Four-Axis Sample Stage | Travel Range X/Y:±15, Z:±15, Phi:90° |
| Infrared Laser Heater | 120-200W |
| Infrared Thermometer | 240-1400°C |
| Infrared Heating PID Temperature Controller-Sample Heating Rate [adjustable] | 0-100°C/min |
| Infrared Heating PID Temperature Controller-Accuracy | 0.5°C |
| Vacuum Interconnect Sample Holder Compatibility | Vacuum Interconnection FLAGTYPE and Square/Round SiC Sample Holders for Samples up to 10×10mm |
| Target Holder with Revolution and Rotation | 6 Target Positions, Quick Plug-In Type |
| Mass Flow Controller | 0-100sccm |
| Gas circuit | Three Gas Lines: N₂, O₂, Ar |
| System Support Platform | 80X80 Aluminum-Profile Table with Casters and Leveling Feet |
| Sample Stage Heating | Software Control |
| Pulse Laser Control | Counting and Continuous Modes Available |
| Growth Programming Module | One-Button Automatic Control of Multilayer-Film and Superlattice Growth |
| Horizontal Laser Input | DN63 Quartz Window |
| Quick-Opening Door | DN160CF |
Key Features
1. Target design: Precise repeatable positioning improves film quality; a unique holder addresses bearing wear/failure in vacuum.2. Heating: Infrared laser heating avoids frequent resistance-heater filament breakage.3. Chamber: Carefully designed structure/layout enables high-quality epitaxial films even without reflection high-energy electron diffraction(RHEED).
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Supplier Information
Hefei Excimer Laser Technology Co., Ltd. (For Short "EXCI") is founded by researchers from the Chinese Academy of Sciences. It is a world‑leading high‑tech enterprise specializing in independent R&D and industrialization of excimer lasers. The company focuses on complete‑machine R&D, large‑scale manufacturing and customized scenario‑oriented solution development for high‑end excimer lasers. Its products serve high‑end scientific research, precision industry and medical sectors, covering excimer laser annealing, lift‑off, repair, photolithography, pulsed laser deposition, superconducting tape fabrication, fiber Bragg grating inscription, and excimer laser medical devices. We provide standardized mass production, personalized customization and full‑life‑cycle maintenance services for multi‑power and multi‑category equipment.
Excimer laser technology represents a scarce core technology for high‑end equipment. Worldwide, only more than ten enterprises across six countries (China, Germany, the United States, Japan, Canada and Russia) possess independent mass‑production core capabilities. ExciLaser ranks among the world’s first‑tier players. Committed to independent and controllable core technologies, the company precisely fills domestic gaps in the high‑end excimer laser industry. It has overcome multiple key bottleneck technologies, realized domestic substitution of high‑end laser equipment, and effectively broken overseas technological monopolies.
Founded in March 2023, the company holds qualifications including National High‑Tech Enterprise, National Science‑ and Technology‑based Small‑ and Medium‑Sized Enterprise, and enterprise status in Hefei’s key industrial‑chain catalog. It has obtained ISO 9001 Quality Management System Certification. The company owns numerous invention patents, utility‑model patents and software copyrights, establishing a complete and independent intellectual‑property protection system to continuously underpin technological iteration, product upgrading and industrial implementation.
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