Laser Molecular Beam Epitaxy System

Laser Molecular Beam Epitaxy System

Supplier
Exclaser
Category
Optical Production Equipment
Origin
China
Request a Quote Download Datasheet
Save to Favorites Save to Favorites

Specifications

ParameterValue
Ultrahigh-Vacuum Main Chamber316L Stainless Steel, Demagnetized by High-Temperature Annealing
High accuracy [RMS]Atomically Flat, RMS<0.1nm
Ultimate Vacuum6×10⁻⁹mbar
Sample Temperature RangeRoom temperature -1100°C
Number of Target Positions5-6 Target Positions
In Situ Monitoring50Pa High-Pressure RHEED
Main Chamber Molecular Pump700L/s
Five-Axis Sample StageTravel Range X/Y:±15, Z:75, Phi:360°, Tilt:180°
Infrared Laser Heater120-200W
Infrared Thermometer240-1400°C/150-1800°C
Sample Holder CompatibilityVacuum Interconnection FLAGTYPE and Square/Round SiC Sample Holders for Samples up to 10×10mm
Scanning Target-Stage SystemSoftware-Controlled Target Switching and Target-Surface Scanning
Target Holder StyleNonmagnetic titanium alloy; plug-in scanning-target holder with one transfer position, transferring all targets at once
Gas circuitThree Gas Lines: N₂, O₂, Ar
Inlet Gas Flow0-100sccm
Inlet Gas Control MethodSoftware-Controlled Gas-Circuit Switching
System Support PlatformAluminum-Profile Table with Casters for Mobility and Leveling Feet
Laser Input Lens248nm high-damage-threshold optical lens; focal length f=500mm
Baffle Control SystemElectronic Control; Stepper-Motor Control Optional
Laser WindowContamination-Resistant Design Extends Window Life
Torr-RHEEDImported, Two-Stage Differential High-Pressure RHEED
Control and Auxiliary SystemsProcess gas pressure, sample-stage heating, pneumatic valves, target-stage scanning and revolution, sample-stage vacuum motor control, and software control of target position.
Pulse Laser ControlCounting Mode and Continuous Mode

Key Features

1. Main vacuum chamber: An ultrahigh-vacuum chamber with in-situ laser-energy monitoring, vacuum generation/measurement, sample stage, laser heating, six-position scanning target stage, gas lines, support platform, laser-entry optics and shutter controls.2. Load-lock/preparation chamber: Cylindrical vacuum chamber with pump, viewing window, main-chamber connection and magnetic transfer rod.3. External devices: In-situ energy monitoring, Torr-RHEED, laser, control/auxiliary systems and upgradeable high-throughput capability. The six-target system is also described as a sputtering system.

Datasheet

Please provide your email to download the datasheet.

Your name
Email Address

Invalid email format. Please try again.

Send Request

Supplier Information

Ex
Exclaser
View Supplier →
Hefei Excimer Laser Technology Co., Ltd. (For Short "EXCI") is founded by researchers from the Chinese Academy of Sciences. It is a world‑leading high‑tech enterprise specializing in independent R&D and industrialization of excimer lasers. The company focuses on complete‑machine R&D, large‑scale manufacturing and customized scenario‑oriented solution development for high‑end excimer lasers. Its products serve high‑end scientific research, precision industry and medical sectors, covering excimer laser annealing, lift‑off, repair, photolithography, pulsed laser deposition, superconducting tape fabrication, fiber Bragg grating inscription, and excimer laser medical devices. We provide standardized mass production, personalized customization and full‑life‑cycle maintenance services for multi‑power and multi‑category equipment. Excimer laser technology represents a scarce core technology for high‑end equipment. Worldwide, only more than ten enterprises across six countries (China, Germany, the United States, Japan, Canada and Russia) possess independent mass‑production core capabilities. ExciLaser ranks among the world’s first‑tier players. Committed to independent and controllable core technologies, the company precisely fills domestic gaps in the high‑end excimer laser industry. It has overcome multiple key bottleneck technologies, realized domestic substitution of high‑end laser equipment, and effectively broken overseas technological monopolies. Founded in March 2023, the company holds qualifications including National High‑Tech Enterprise, National Science‑ and Technology‑based Small‑ and Medium‑Sized Enterprise, and enterprise status in Hefei’s key industrial‑chain catalog. It has obtained ISO 9001 Quality Management System Certification. The company owns numerous invention patents, utility‑model patents and software copyrights, establishing a complete and independent intellectual‑property protection system to continuously underpin technological iteration, product upgrading and industrial implementation.

Request a Quote

Our team responds within 24–48 hours
Laser Molecular Beam Epitaxy System
Exclaser · Optical Production Equipment
Direct from Manufacturer
Your inquiry will be sent directly to the manufacturer
Photonics Source Platform
We handles the inquiry on your behalf
Your information is protected and will never be shared without consent.
Contact Us

Loading...

GetExperimental Plan

Name

Phone

+86

Organization

Use Case

AI Parametric Selection
Smart Match · Precise Recs
Enter Specifications
AI Smart Matching
Get Best Matches
Skip Manual Comparison
Find Best Solutions Fast
Select Now →