Laser Molecular Beam Epitaxy System
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Specifications
| Parameter | Value |
|---|---|
| Ultrahigh-Vacuum Main Chamber | 316L Stainless Steel, Demagnetized by High-Temperature Annealing |
| High accuracy [RMS] | Atomically Flat, RMS<0.1nm |
| Ultimate Vacuum | 6×10⁻⁹mbar |
| Sample Temperature Range | Room temperature -1100°C |
| Number of Target Positions | 5-6 Target Positions |
| In Situ Monitoring | 50Pa High-Pressure RHEED |
| Main Chamber Molecular Pump | 700L/s |
| Five-Axis Sample Stage | Travel Range X/Y:±15, Z:75, Phi:360°, Tilt:180° |
| Infrared Laser Heater | 120-200W |
| Infrared Thermometer | 240-1400°C/150-1800°C |
| Sample Holder Compatibility | Vacuum Interconnection FLAGTYPE and Square/Round SiC Sample Holders for Samples up to 10×10mm |
| Scanning Target-Stage System | Software-Controlled Target Switching and Target-Surface Scanning |
| Target Holder Style | Nonmagnetic titanium alloy; plug-in scanning-target holder with one transfer position, transferring all targets at once |
| Gas circuit | Three Gas Lines: N₂, O₂, Ar |
| Inlet Gas Flow | 0-100sccm |
| Inlet Gas Control Method | Software-Controlled Gas-Circuit Switching |
| System Support Platform | Aluminum-Profile Table with Casters for Mobility and Leveling Feet |
| Laser Input Lens | 248nm high-damage-threshold optical lens; focal length f=500mm |
| Baffle Control System | Electronic Control; Stepper-Motor Control Optional |
| Laser Window | Contamination-Resistant Design Extends Window Life |
| Torr-RHEED | Imported, Two-Stage Differential High-Pressure RHEED |
| Control and Auxiliary Systems | Process gas pressure, sample-stage heating, pneumatic valves, target-stage scanning and revolution, sample-stage vacuum motor control, and software control of target position. |
| Pulse Laser Control | Counting Mode and Continuous Mode |
Key Features
1. Main vacuum chamber: An ultrahigh-vacuum chamber with in-situ laser-energy monitoring, vacuum generation/measurement, sample stage, laser heating, six-position scanning target stage, gas lines, support platform, laser-entry optics and shutter controls.2. Load-lock/preparation chamber: Cylindrical vacuum chamber with pump, viewing window, main-chamber connection and magnetic transfer rod.3. External devices: In-situ energy monitoring, Torr-RHEED, laser, control/auxiliary systems and upgradeable high-throughput capability. The six-target system is also described as a sputtering system.
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Supplier Information
Hefei Excimer Laser Technology Co., Ltd. (For Short "EXCI") is founded by researchers from the Chinese Academy of Sciences. It is a world‑leading high‑tech enterprise specializing in independent R&D and industrialization of excimer lasers. The company focuses on complete‑machine R&D, large‑scale manufacturing and customized scenario‑oriented solution development for high‑end excimer lasers. Its products serve high‑end scientific research, precision industry and medical sectors, covering excimer laser annealing, lift‑off, repair, photolithography, pulsed laser deposition, superconducting tape fabrication, fiber Bragg grating inscription, and excimer laser medical devices. We provide standardized mass production, personalized customization and full‑life‑cycle maintenance services for multi‑power and multi‑category equipment.
Excimer laser technology represents a scarce core technology for high‑end equipment. Worldwide, only more than ten enterprises across six countries (China, Germany, the United States, Japan, Canada and Russia) possess independent mass‑production core capabilities. ExciLaser ranks among the world’s first‑tier players. Committed to independent and controllable core technologies, the company precisely fills domestic gaps in the high‑end excimer laser industry. It has overcome multiple key bottleneck technologies, realized domestic substitution of high‑end laser equipment, and effectively broken overseas technological monopolies.
Founded in March 2023, the company holds qualifications including National High‑Tech Enterprise, National Science‑ and Technology‑based Small‑ and Medium‑Sized Enterprise, and enterprise status in Hefei’s key industrial‑chain catalog. It has obtained ISO 9001 Quality Management System Certification. The company owns numerous invention patents, utility‑model patents and software copyrights, establishing a complete and independent intellectual‑property protection system to continuously underpin technological iteration, product upgrading and industrial implementation.
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