ART air-bearing rotary stage (ART-200)
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Specifications
| Parameter | Value |
|---|---|
| Table Diameter | 200 mm |
| Height | 95 mm |
| Center Hole Size | 35 mm |
| Maximum Load | 100 kg |
| Rotational Speed | 500 rpm |
| Acceleration | 100 rpm/s |
| Continuous Torque | 5.4 Nm |
| Peak Torque | 10.6 Nm |
| Weight | 25 kg |
| Air Consumption | 60 L/min |
| Air Supply Pressure | 0.5-0.6MPa |
| Failure-free Operating Time | 20000h |
| Positioning Accuracy [Precision Test Speed 60&120rpm; Standard Accuracy] | ±2 arc sec |
| Positioning Repeatability [Precision Test Speed 60&120rpm; Standard Accuracy] | ±1 arc sec |
| Axial Synchronous Error [Precision Test Speed 60&120rpm; Standard Accuracy] | 200 nm |
| Radial Synchronous Error [Precision Test Speed 60&120rpm; Standard Accuracy] | 200 nm |
| Tilt Synchronous Error [Precision Test Speed 60&120rpm; Standard Accuracy] | 2.5 urad |
| Positioning Accuracy [After Configuration Upgrade; Precision Test Speed 60&120rpm] | ±1arc sec |
| Positioning Repeatability [After Configuration Upgrade; Precision Test Speed 60&120rpm] | ±0.5arc sec |
| Axial Synchronous Error [After Configuration Upgrade; Precision Test Speed 60&120rpm] | 100-150nm |
| Radial Synchronous Error [After Configuration Upgrade; Precision Test Speed 60&120rpm] | 100-150nm |
| Supply Voltage | 220VAC |
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Key Features
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