Quartz Glass for Photolithography Technology

Material: CaF Surface Figure Accuracy: Polished Surface Parallelism: ≤30 arcsec

An optical window is a transparent physical barrier that transmits light between environments differing in temperature, pressure, chemical composition or cleanliness.

Material: BaF₂ Surface Figure Accuracy: Polished Surface Parallelism: ≤30 arcsec

An optical window is a transparent physical barrier that transmits light between different environments.

Material: MaF Surface Figure Accuracy: Polished Surface Parallelism: ≤30 arcsec

An optical window is a transparent physical barrier that transmits light between environments differing in temperature, pressure, chemical composition or cleanliness.

Material: JGS1/JGS2/JGS3 Surface Figure Accuracy: λ/20 Parallelism: ≤5 arcsec

An optical window is a transparent physical barrier that transmits light between different environments.

Composition - SiO2 [Synthetic Quartz]: 100% OH Content [Synthetic Quartz]: <100ppm Impurities [Synthetic Quartz]: Each of the Eight Impurity Elements Al, Ca, Cu, Fe, Na, K, Li and Mg in the Quartz-glass Substrate Is <0.01ppm

A blank mask becomes a photomask after a pattern is formed on its surface;