Vacuum plasma cleaner

Vacuum plasma cleaner

Supplier
Sufastech
Category
Semiconductor Packaging Equipment
Origin
China

Vacuum plasma cleaner (Plasmacleaner); gas is ionized into a plasma state through the excitation power supply; the plasma acts on the product surface, cleaning surface contaminants, improving surface activity, and enhancing adhesion performance.

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Overview

Vacuum plasma cleaner (Plasmacleaner); gas is ionized into a plasma state through the excitation power supply; the plasma acts on the product surface, cleaning surface contaminants, improving surface activity, and enhancing adhesion performance.

Specifications

ParameterValue
Power supply system - Power [RF power supply]0~1000 W
Power supply system - Power [Medium-frequency power supply]0~1000 W or 0~2000 W
Power supply system - Frequency [RF power supply]13.56 MHz
Power supply system - Frequency [Medium-frequency power supply]40 KHz
Vacuum system - Two-stage rotary vane pump (oil pump)Two-stage rotary vane pump (oil pump) or Roots pump + single-stage rotary vane pump
Vacuum system - Vacuum pipelineAll-stainless-steel pipeline, and high-strength vacuum hose
Vacuum system - Material [Customizable stainless steel chamber]Aluminum alloy (customizable stainless steel chamber)
Vacuum system - Thickness25 mm
Vacuum system - SealingMilitary-grade welded seal
Vacuum system - Internal chamber dimensions [W×H×D]500 mm ×500 mm ×675 mm (W×H×D)
Vacuum System-Electrode Plate Effective Dimensions [W×D]587 mm ×470 mm (W×D)
Vacuum System-Available Space Spacing34 mm
Vacuum System-Working Space8 layers
Gas System-Flow Range0~300 SCCM
Gas System-Process Gas Lines [Two standard channels; customizable]Two standard channels, customizable (argon, nitrogen, oxygen, hydrogen or mixed gas)

Key Features

· Flexible and versatile product placement fixtures, able to accommodate irregular products; · Horizontal electrode design, meeting the processing needs of flexible products; · Low energy and gas consumption; · Convenient board loading/unloading method.; · Integrated vacuum system, small footprint; · Reasonable plasma reaction space, making processing more uniform

Datasheet

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Supplier Information

Su
Sufastech
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Chengdu Sufastech Technology Co., Ltd., founded in 2018, is committed to the upstream, midstream and downstream of information-related scientific research and industry, timely follows the world's most cutting-edge scientific research directions, and quickly transforms its own technology and service capabilities. It is honest and win-win with partners in the long term. After years of professional accumulation, relying on well-known professors and doctoral consultant teams in the field, Sufastech has the overall planning and construction capabilities of optical chip packaging and testing, the overall planning and construction capabilities of optical transmission testing systems, and the overall planning and construction capabilities of micro-assembly production lines, gradually achieving coverage of the entire industry chain in the subdivided field of optoelectronic packaging and testing. Products cover high-frequency optoelectronic devices and modules, test and measurement instruments, and chip packaging equipment. In 2022, Sufastech invested heavily in building its own packaging and testing laboratory. The laboratory has full-process equipment from die bonding to sealing to testing, aiming to provide the public with the most convenient scientific research and small-batch proofing services. Since its establishment, Sufastech has maintained rapid development, with an average annual sales growth rate of more than 50%. In 2021, the newly added contract amount exceeded 50 million yuan, and it was recognized as an "Eagle" plan enterprise by Chengdu High-tech Zone. In the same year, it obtained "National High-tech Enterprise". In 2022, it completed the "Three Systems" certification. In 2023, the newly added annual sales exceeded 100 million yuan, and it was awarded "Gazelle Enterprise" by Chengdu High-tech Zone. In 2024, in order to strengthen service coverage, Sufastech Suzhou Company was established, and permanent staff were assigned in Beijing, Qingdao, Wuhan, Shenzhen, and Zhengzhou. In the same year, Sufastech Technology successfully passed the "Specialized, Refined, Distinctive, and Innovative" enterprise certification of Sichuan Province, striding into a new stage of development.

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Vacuum plasma cleaner
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