Single-axis precision dicing machine (semi-automatic)
● Wafer cutting equipment using high-precision bidirectional silent air spindle:; ● Cutting area: 4 inch, 6 inch wafers;; ● High precision: for resin substrates with irregular expansion and contraction, high-precision processing is possible through cutting line calibration at multiple points;; ● Simple and convenient operation: 17-inch touch screen;; ● Automatic blade mark calibration function: automatically measures the offset of the cutting street and the width of the cutting mark, managing processing quality;; ● Blade breakage detection function: blade breakage detection during cutting.; ● 4/6 inch IC, wafer cutting; ● Silicon, quartz, aluminum oxide, iron oxide, gallium arsenide, sapphire, glass, etc.
Overview
Specifications
| Parameter | Value |
|---|---|
| Stage format | 310 mm × 310 mm |
| X-axis working stroke | 0-600 mm |
| Y1, Y2 axis working stroke | 0-500mm |
| Repeatability | ±0.0015 mm |
| Z1, Z2 axis working stroke | 0-65mm |
| Repeat positioning accuracy 2 | ±0.001mm |
| Rotary axis working angle | ±185° |
| Air spindle rated output power | 1.8KW |
| Air spindle main spindle cutting speed | 6000-60000r/min |
| CCD configuration | Dual CCD: 1x / 4x vision, dual light source (optional) |
| Blade size range | 52-60mm |
| Contact height measurement | Contact tool setting, accuracy ±0.002mm |
| Non-contact height measurement | High-sensitivity fiber optic sensing tool setting, accuracy ±0.001mm |
| Power Requirements | 3-phase AC380±10%, 50/60Hz |
| Total equipment weight | 1600KG |
| L x W x H | 1380 mm × 1300 mm × 1820 mm |
Datasheet
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