Super-precision UV-second laser high-speed processing system
The high-precision ultra-UV flight second laser high-speed processing system of the Roban-GT series is equipped with an ultraviolet flight second laser amplifier as a processing light source. The system is equipped with a high-speed scanning persimmons and 4f optical systems for high-speed, high-precision processing through mirrors in the mirror scanning visual field. At the same time, the system uses a two-dimensional high-precision air bearing straight-line power migration platform for laser s
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Overview
The high-precision ultra-UV flight second laser high-speed processing system of the Roban-GT series is equipped with an ultraviolet flight second laser amplifier as a processing light source. The system is equipped with a high-speed scanning persimmons and 4f optical systems for high-speed, high-precision processing through mirrors in the mirror scanning visual field. At the same time, the system uses a two-dimensional high-precision air bearing straight-line power migration platform for laser scanning of large-scale, continuous micronarcing structures and for matching lens scanning with limited scanning ranges throughout the journey; this allows for the simultaneous high-speed and wide-range needs of laser ultra-precision processing. The system applies to the manufacture of cross-scale structures for processing range above centimetre scale and nanoscale processing accuracy
Specifications
| Parameter | Value |
|---|---|
| Light | Flight seconds laser amplifier (343 nm, 1-200 kHz), optional |
| Process materials | Transparency media materials, semiconductor materials, metals, polymers, etc |
| Axis repeat location precision | ± 50 nm; ± 100 nm |
| Maximum Scan Speed | 200 mm/s |
| 3D processing range | 100 mm (L) × 100 mm (W) × 60 mm (H) |
| Process File Format | Supports the conversion of CAD files by bitmap, DXF and STL |
| System exterior dimensions | 800 mm (L) × 600 mm (W) × 600 mm (H) |
| Electrical requirements | 200~240 V AC, 50/60 Hz, 5 kW |
Applications
Melting stone surfaces; 2. Clean removal of glass surfaces; 3. ultra-precision lines of film surfaces
Key Features
Super-precision processing (characterized size < 100 nm); cross-scale structural manufacture; wide application of materials; machine visualization; automated control of system hardware, process processes and processing parameters
Datasheet
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Supplier Information
Jilin Jicheng Ultrafast Equipment Co., Ltd. was established in 2019 as a high-tech enterprise incubated by the Ultrafast Optoelectronic Technology Center of Jilin University. The R&D team has 15 years of experience in femtosecond laser micromachining technology, committed to building intelligent laser 3D micromachining commercial systems with independent intellectual property rights. The company has launched two types of femtosecond laser processing systems: Maleon series for two-photon polymerization 3D printing of soft materials, and Roban series for micromachining of hard brittle materials. These systems have been used by Tsinghua University, Fudan University and other research institutions.
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