White Light Interferometric Thin Film Thickness Meter Delta
Semiconductors (SiO2/SiNx, photoresist, MEMS, SOI, etc.), LCD/TFT/PDP (LCD cell gap, polyimide ITO, etc.), LED (SiO2, photoresist ITO, etc.), touch screens (ITO AR Coating reflectance/transmittance testing, etc.), automotive (anti-fog layers, Hard Coating DLC, etc.), medical (parylene-coated balloon/catheter wall thickness
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Overview
Specifications
| Parameter | Value |
|---|---|
| Delta-VIS-Wavelength Range | 380-1050nm |
| Delta-VIS-Thickness Range | 50nm-40um |
| Delta-VIS-Accuracy | 2nm |
| Delta-VIS-Precision | 0.2nm |
| Delta-VIS-Angle of Incidence | 90° |
| Delta-VIS-Sample Material | Transparent or translucent |
| Delta-VIS-Measurement Mode | Reflection/transmission |
| Delta-VIS-Spot Size | 2mm |
| Delta-VIS-Inline Capability | Yes |
| Delta-VIS-Scan Selection | XY optional |
| Delta-DUV-Wavelength Range | 190-1100nm |
| Delta-DUV-Thickness Range | 1nm-30um |
| Delta-DUV-Accuracy | 1nm |
| Delta-DUV-Precision | 0.2nm |
| Delta-DUV-Angle of Incidence | 90° |
| Delta-DUV-Sample Material | Transparent or translucent |
| Delta-DUV-Measurement Mode | Reflection/transmission |
| Delta-DUV-Spot Size | 2mm |
| Delta-DUV-Inline Capability | Yes |
| Delta-DUV-Scan Selection | XY optional |
| Delta-NIR-Wavelength Range | 900-1700nm |
| Delta-NIR-Thickness Range | 10um-3mm |
| Delta-NIR-Accuracy | 10nm |
| Delta-NIR-Precision | 3nm |
| Delta-NIR-Angle of Incidence | 90° |
| Delta-NIR-Sample Material | Transparent or translucent |
| Delta-NIR-Measurement Mode | Reflection/transmission |
| Delta-NIR-Spot Size | 2mm |
| Delta-NIR-Inline Capability | Yes |
| Delta-NIR-Scan Selection | XY optional |
Applications
Datasheet
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Supplier Information
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