Beam-Pointing Stabilization System

Beam-Pointing Stabilization System

Supplier
Lumi-universe
Category
Optical Metrology
Origin
China

In precision optics, thermal drift and stress relaxation can cause low-frequency beam disturbances and sustained spot drift. A highly sensitive camera detects disturbances in real time, while intelligent control dynamically steers an electrically controlled mirror to maintain a preset direction. Unlike other pointing-lock systems, camera detection with small pixels improves locking accuracy. During locking, users can observe spot shape and monitor beam power and its changes in real time.

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Overview

In precision optics, thermal drift and stress relaxation can cause low-frequency beam disturbances and sustained spot drift. A highly sensitive camera detects disturbances in real time, while intelligent control dynamically steers an electrically controlled mirror to maintain a preset direction. Unlike other pointing-lock systems, camera detection with small pixels improves locking accuracy. During locking, users can observe spot shape and monitor beam power and its changes in real time.

Specifications

ParameterValue
Correction Capability [Single mirror, X,Y directions; correction range increases with multiple mirrors.]Single mirror X,Y directions ± 0.4 mrad (correction range increases with multiple mirrors).
Minimum Stride≤0.1μrad
Direction LockingAccuracy [(@RMSE, Focal Point)]≤1urad (@RMSE, Focal Point)
Response Frequency10 Hz
Operational Wavelength400 - 1000 nm

Key Features

No precision initial alignment required for simple, rapid deployment; real-time spot-shape observation and spot-quality analysis; optimized algorithm for fast locking configuration.

Datasheet

Product Datasheet
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Supplier Information

Lu
Lumi-universe
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Hefei Haoyu Xinguang Technology Co., Ltd. was founded in 2023, focusing on advanced laser applications and core semiconductor inspection & measurement technologies. It specializes in core components, instruments, and system development for the extreme ultraviolet (EUV) / vacuum ultraviolet (VUV) band. Co-founded by renowned EUV laser experts and industry veterans, the company is committed to customer-driven innovation and efficient service, aiming to become a world-leading advanced laser applications enterprise.

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Beam-Pointing Stabilization System
Lumi-universe · Optical Metrology
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