Optical System for Plastic Film Thickness Measurement UVS3-180-500
Plastic-film thickness optical system: UV xenon lamp, UV spectrometer and probe. White-light interference uses d = (wave2 - wave1)/deltaWave * K, where wave is wavelength, deltaWave the two-peak separation and K the refractive coefficient. Typical range is 0.5um -100um: approximately 200nm UV for 0.5um films, 500-600nm visible for 10-50um, and 800nm IR for around 80um. Above 100um, vernier calipers are recommended. Transparent films use transmission; opaque films, such as semiconductor etch endpoints, use reflection. A CMOS UV spectrometer and xenon source provide a cost-effective solution, with a JPN detector and USA/Germany hardware. 1. Integrated CMOS/xenon UV system simplifies measurement. 2. A high-performance flashing xenon lamp gives stable UV measurements. 3. Low-cost integration reduces complexity and provides a complete solution.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wavelength Range | 180-500nm |
| Grating | 1200line/mm |
| Resolution (FWHM) [MIN FWHM] | 0.2nm (MIN FWHM) |
| Detector | CMOS 2048 pixel from JAPAN |
| Xenon | Xenon from JAPAN |
| Xenon Power | 2W / 5W / 20W |
| Xenon Wavelength | 200-1200nm |
| Xenon Working Hour | 10x9 Flash |
| Integration Time | 0.06ms - 65 seconds |
| Optical Slit [25um(default)] | 25um(default) / 50um / 100um / 200um |
| Optical Fiber Interface | SMA905 |
| Absorption [MAX] | 3AU(MAX) |
| Probe | Reflex |
| Fan-Cooled | Yes |
| LCD Display | Supported |
| On-board Calculation | Yes |
| Fiber | 105um |
| Signal/Noise | 800:1 |
| Dimensions | 220 mm × 185 mm × 94 mm |
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Datasheet
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