TF200 Optical Film Thickness Gauge
Semiconductors (SiO2/SiNx, photoresist, MEMS, SOI, etc.) LCD/TFT/PDP (LCD cell gap, polyimide ITO, etc.) LED (SiO2, photoresist ITO, etc.)
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wavelength Range | 380-1050nm |
| Thickness Range | 50nm-40um |
| Accuracy | 2nm |
| Accuracy | 0.2nm |
| Angle of Incidence | 90° |
| Sample Material | Transparent or translucent |
| Measurement Mode | Reflection/transmission |
| Measurement Spot Size | 2mm |
| Whether Online | Yes |
| Scan Selection | XY optional |
Applications
Datasheet
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