plasma cleaning machine
Plasma is a state of matter, also called the fourth state of matter, and does not belong to the common solid, liquid and gas states. Applying enough energy to a gas to ionize it turns it into the plasma state. The VPC30 small plasma cleaner uses the properties of the active components of plasma to treat the surfaces of plastic workpieces, metal-based workpieces, ceramics, glass and other workpieces, thereby achieving cleaning, modification and other purposes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Cavity Material | 316 stainless steel |
| Volume | 10L |
| Electrode Plate | Flat water-bath electrode |
| Electrode | Dedicated aluminum electrodes, adjustable vertical spacing |
| Single Processing Time | Processing time varies with process; surface activation modification within 5~10min |
| Operating Vacuum Level | 20~60Pa |
| Vacuum Pump Ultimate Pressure | 0.5Pa (no-load test) |
| Evacuation Time | ≤ 40s |
| Vacuum Break Time | ≤ 20s |
| Plasma Generator | Uses 13.56 MHz RF power supply with adjustable power 0~300 W; modular design of RF power supply and matching network |
| Gas Supply Method | Solenoid valve type |
| Flow Meter Control | Two MFC mass flow controllers |
| Flow Meter Adjustment Range | 0~300ml/min (optional) |
| Flow Meter Accuracy | 4% |
| Operation Mode | Manual workpiece loading/unloading; one-key start automatic control |
Datasheet
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