Diffraction 3D Profiler NM Series
The simulated optical parameters obtained through the optical forward modeling algorithm are compared with the actually measured optical parameters; using LM algorithms, library matching and neural network algorithms, structural parameters such as the duty cycle, thickness and sidewall angle of the sample grating are extracted.
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Overview
The simulated optical parameters obtained through the optical forward modeling algorithm are compared with the actually measured optical parameters; using LM algorithms, library matching and neural network algorithms, structural parameters such as the duty cycle, thickness and sidewall angle of the sample grating are extracted.
Applications
Grating measurement, periodic structure measurement, CD dimension measurement; application examples: 3D topography APIVR structured grating-3D topography DRAM-3D topography NAND-3D topography optical communication silicon waveguide-3D topography biochip-3D topography
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Supplier Information
Banshi Intelligent Technology (Shenzhen) Co., Ltd., a national-level specialized and sophisticated "Little Giant" and high-tech enterprise, focuses on providing precision measuring instruments and semiconductor metrology equipment to global customers.
Currently, Banshi Intelligent provides stable and reliable services to many well-known enterprises such as Huawei HiSilicon, CATL, II-VI, Accelink, Bozhon, Chinese Academy of Sciences, AT&S, Shennan Circuits, Kinwong, and Huatian Technology.
With the mission of "Exploring the future of humanity with precision measurement" and the vision of "Becoming a leader in precision measurement", Banshi Intelligent will continue to innovate in the fields of precision measurement and semiconductor metrology, redefining the connotation of "Intelligent Manufacturing in China" with product technology, and contributing Banshi's strength to the rise of Chinese instruments.
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"Atometrics" has launched multiple high-precision measurement products such as white light interferometers, flash testers, ultra-depth-of-field microscopes, line laser sensors, point laser sensors, spectral confocal displacement sensors, line spectral displacement sensors, wafer 3D metrology, and packaging substrate 3D automatic inspection equipment.
They have been widely used in semiconductors, aerospace, 3C electronics, 5G communications, new energy, biomedical and other fields.
Providing customers with high-quality products and services is our unremitting pursuit. Our team of world's top scientists and experienced engineers is a key advantage to ensure customer success.
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